Wideband MEMS Resonator Using Multifrequency Excitation

Handle URI:
http://hdl.handle.net/10754/601137
Title:
Wideband MEMS Resonator Using Multifrequency Excitation
Authors:
Jaber, Nizar; Ramini, Abdallah; Al Hennawi, Qais M. ( 0000-0003-3741-842X ) ; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We demonstrate the excitation of combination resonances of additive and subtractive types and their exploitations to realize a large bandwidth micro-machined resonator of large amplitude even at higher harmonic modes of vibrations. The investigation is conducted on a Microelectromechanical systems (MEMS) clamped-clamped microbeam fabricated using polyimide as a structural layer coated with nickel from top and chromium and gold layers from bottom. The microbeam is excited by a two-source harmonic excitation, where the first frequency source is swept around the targeted resonance (first or third mode of vibration) while the second source frequency is kept fixed. We report for the first time a large bandwidth and large amplitude response near the higher order modes of vibration. Also, we show that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
Wideband MEMS Resonator Using Multifrequency Excitation 2016 Sensors and Actuators A: Physical
Publisher:
Elsevier BV
Journal:
Sensors and Actuators A: Physical
Issue Date:
9-Mar-2016
DOI:
10.1016/j.sna.2016.02.030
Type:
Article
ISSN:
09244247
Additional Links:
http://linkinghub.elsevier.com/retrieve/pii/S0924424716300851
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorJaber, Nizaren
dc.contributor.authorRamini, Abdallahen
dc.contributor.authorAl Hennawi, Qais M.en
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2016-03-10T13:13:16Zen
dc.date.available2016-03-10T13:13:16Zen
dc.date.issued2016-03-09en
dc.identifier.citationWideband MEMS Resonator Using Multifrequency Excitation 2016 Sensors and Actuators A: Physicalen
dc.identifier.issn09244247en
dc.identifier.doi10.1016/j.sna.2016.02.030en
dc.identifier.urihttp://hdl.handle.net/10754/601137en
dc.description.abstractWe demonstrate the excitation of combination resonances of additive and subtractive types and their exploitations to realize a large bandwidth micro-machined resonator of large amplitude even at higher harmonic modes of vibrations. The investigation is conducted on a Microelectromechanical systems (MEMS) clamped-clamped microbeam fabricated using polyimide as a structural layer coated with nickel from top and chromium and gold layers from bottom. The microbeam is excited by a two-source harmonic excitation, where the first frequency source is swept around the targeted resonance (first or third mode of vibration) while the second source frequency is kept fixed. We report for the first time a large bandwidth and large amplitude response near the higher order modes of vibration. Also, we show that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled.en
dc.language.isoenen
dc.publisherElsevier BVen
dc.relation.urlhttp://linkinghub.elsevier.com/retrieve/pii/S0924424716300851en
dc.rightsNOTICE: this is the author’s version of a work that was accepted for publication in Sensors and Actuators A: Physical. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Sensors and Actuators A: Physical, 9 March 2016. DOI: 10.1016/j.sna.2016.02.030en
dc.subjectnonlinear dynamicsen
dc.subjectresonatoren
dc.subjectmixed frequencyen
dc.subjectwide banden
dc.subjectvibrationen
dc.subjectelectrostaticen
dc.titleWideband MEMS Resonator Using Multifrequency Excitationen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalSensors and Actuators A: Physicalen
dc.eprint.versionPost-printen
dc.contributor.institutionDepartment of Mechanical Engineering, State University of New York, Binghamton, NY 13902, USAen
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)en
kaust.authorJaber, Nizaren
kaust.authorRamini, Abdallahen
kaust.authorAl Hennawi, Qais M.en
kaust.authorYounis, Mohammad I.en
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