A Monte Carlo Simulation approach for the modeling of free-molecule squeeze-film damping of flexible microresonators

Handle URI:
http://hdl.handle.net/10754/600239
Title:
A Monte Carlo Simulation approach for the modeling of free-molecule squeeze-film damping of flexible microresonators
Authors:
Leung, Roger; Cheung, Howard; Gang, Hong; Ye, Wenjing
Abstract:
Squeeze-film damping on microresonators is a significant damping source even when the surrounding gas is highly rarefied. This article presents a general modeling approach based on Monte Carlo (MC) simulations for the prediction of squeeze-film damping on resonators in the freemolecule regime. The generality of the approach is demonstrated in its capability of simulating resonators of any shape and with any accommodation coefficient. The approach is validated using both the analytical results of the free-space damping and the experimental data of the squeeze-film damping on a clamped-clamped plate resonator oscillating at its first flexure mode. The effect of oscillation modes on the quality factor of the resonator has also been studied and semi-analytical approximate models for the squeeze-film damping with diffuse collisions have been developed.
Citation:
Leung R, Cheung H, Gang H, Ye W (2010) A Monte Carlo Simulation approach for the modeling of free-molecule squeeze-film damping of flexible microresonators. Microfluid Nanofluid 9: 809–818. Available: http://dx.doi.org/10.1007/s10404-010-0597-0.
Publisher:
Springer Nature
Journal:
Microfluidics and Nanofluidics
KAUST Grant Number:
SA-C0040; UK-C0016
Issue Date:
31-Mar-2010
DOI:
10.1007/s10404-010-0597-0
Type:
Article
ISSN:
1613-4982; 1613-4990
Sponsors:
This publication is based on work supported in part by Award No. SA-C0040/UK-C0016, made by King Abdullah University of Science and Technology (KAUST), and in part by Hong Kong Research Grants Council under Competitive Earmarked Research Grant 621408.
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Full metadata record

DC FieldValue Language
dc.contributor.authorLeung, Rogeren
dc.contributor.authorCheung, Howarden
dc.contributor.authorGang, Hongen
dc.contributor.authorYe, Wenjingen
dc.date.accessioned2016-02-28T07:59:46Zen
dc.date.available2016-02-28T07:59:46Zen
dc.date.issued2010-03-31en
dc.identifier.citationLeung R, Cheung H, Gang H, Ye W (2010) A Monte Carlo Simulation approach for the modeling of free-molecule squeeze-film damping of flexible microresonators. Microfluid Nanofluid 9: 809–818. Available: http://dx.doi.org/10.1007/s10404-010-0597-0.en
dc.identifier.issn1613-4982en
dc.identifier.issn1613-4990en
dc.identifier.doi10.1007/s10404-010-0597-0en
dc.identifier.urihttp://hdl.handle.net/10754/600239en
dc.description.abstractSqueeze-film damping on microresonators is a significant damping source even when the surrounding gas is highly rarefied. This article presents a general modeling approach based on Monte Carlo (MC) simulations for the prediction of squeeze-film damping on resonators in the freemolecule regime. The generality of the approach is demonstrated in its capability of simulating resonators of any shape and with any accommodation coefficient. The approach is validated using both the analytical results of the free-space damping and the experimental data of the squeeze-film damping on a clamped-clamped plate resonator oscillating at its first flexure mode. The effect of oscillation modes on the quality factor of the resonator has also been studied and semi-analytical approximate models for the squeeze-film damping with diffuse collisions have been developed.en
dc.description.sponsorshipThis publication is based on work supported in part by Award No. SA-C0040/UK-C0016, made by King Abdullah University of Science and Technology (KAUST), and in part by Hong Kong Research Grants Council under Competitive Earmarked Research Grant 621408.en
dc.publisherSpringer Natureen
dc.subjectFree-molecule regimeen
dc.subjectMicro-resonatoren
dc.subjectMonte Carlo simulationen
dc.subjectOscillation modeen
dc.subjectQuality factoren
dc.subjectSqueeze-film dampingen
dc.titleA Monte Carlo Simulation approach for the modeling of free-molecule squeeze-film damping of flexible microresonatorsen
dc.typeArticleen
dc.identifier.journalMicrofluidics and Nanofluidicsen
dc.contributor.institutionDepartment of Mechanical Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kongen
kaust.authorYe, Wenjingen
kaust.grant.numberSA-C0040en
kaust.grant.numberUK-C0016en
kaust.grant.fundedcenterKAUST-HKUST Micro/Nanofluidic Joint Laboratoryen
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