Handle URI:
http://hdl.handle.net/10754/599865
Title:
Tapping mode microwave impedance microscopy
Authors:
Lai, K.; Kundhikanjana, W.; Peng, H.; Cui, Y.; Kelly, M. A.; Shen, Z. X.
Abstract:
We report tapping mode microwave impedance imaging based on atomic force microscope platforms. The shielded cantilever probe is critical to localize the tip-sample interaction near the tip apex. The modulated tip-sample impedance can be accurately simulated by the finite-element analysis and the result agrees quantitatively to the experimental data on a series of thin-film dielectric samples. The tapping mode microwave imaging is also superior to the contact mode in that the thermal drift in a long time scale is totally eliminated and an absolute measurement on the dielectric properties is possible. We demonstrated tapping images on working nanodevices, and the data are consistent with the transport results. © 2009 American Institute of Physics.
Citation:
Lai K, Kundhikanjana W, Peng H, Cui Y, Kelly MA, et al. (2009) Tapping mode microwave impedance microscopy. Review of Scientific Instruments 80: 043707. Available: http://dx.doi.org/10.1063/1.3123406.
Publisher:
AIP Publishing
Journal:
Review of Scientific Instruments
KAUST Grant Number:
KUS-F1-033-02
Issue Date:
2009
DOI:
10.1063/1.3123406
PubMed ID:
19405666
Type:
Article
ISSN:
0034-6748
Sponsors:
The research is funded by Center of Probing the Nanoscale (CPN), Stanford University, a gift grant of Agilent Technologies, Inc., and DOE under Contract Nos. DE-FG03-01ER45929-A001 and DE-FG36-08GOI8004. This publication is also based on work supported by Award No. KUS-F1-033-02, made by King Abdullah University of Science and Technology (KAUST) under the global research partnership (GRP) program. CPN is an NSF NSEC, NSF Grant No. PHY-0425897. The cantilevers were fabricated in Stanford Nanofabrication Facility (SNF) by A. M. Fitzgerald and B. Chui in A. M. Fitzgerald & Associates, LLC, San Carlos, CA.
Appears in Collections:
Publications Acknowledging KAUST Support

Full metadata record

DC FieldValue Language
dc.contributor.authorLai, K.en
dc.contributor.authorKundhikanjana, W.en
dc.contributor.authorPeng, H.en
dc.contributor.authorCui, Y.en
dc.contributor.authorKelly, M. A.en
dc.contributor.authorShen, Z. X.en
dc.date.accessioned2016-02-28T06:31:13Zen
dc.date.available2016-02-28T06:31:13Zen
dc.date.issued2009en
dc.identifier.citationLai K, Kundhikanjana W, Peng H, Cui Y, Kelly MA, et al. (2009) Tapping mode microwave impedance microscopy. Review of Scientific Instruments 80: 043707. Available: http://dx.doi.org/10.1063/1.3123406.en
dc.identifier.issn0034-6748en
dc.identifier.pmid19405666en
dc.identifier.doi10.1063/1.3123406en
dc.identifier.urihttp://hdl.handle.net/10754/599865en
dc.description.abstractWe report tapping mode microwave impedance imaging based on atomic force microscope platforms. The shielded cantilever probe is critical to localize the tip-sample interaction near the tip apex. The modulated tip-sample impedance can be accurately simulated by the finite-element analysis and the result agrees quantitatively to the experimental data on a series of thin-film dielectric samples. The tapping mode microwave imaging is also superior to the contact mode in that the thermal drift in a long time scale is totally eliminated and an absolute measurement on the dielectric properties is possible. We demonstrated tapping images on working nanodevices, and the data are consistent with the transport results. © 2009 American Institute of Physics.en
dc.description.sponsorshipThe research is funded by Center of Probing the Nanoscale (CPN), Stanford University, a gift grant of Agilent Technologies, Inc., and DOE under Contract Nos. DE-FG03-01ER45929-A001 and DE-FG36-08GOI8004. This publication is also based on work supported by Award No. KUS-F1-033-02, made by King Abdullah University of Science and Technology (KAUST) under the global research partnership (GRP) program. CPN is an NSF NSEC, NSF Grant No. PHY-0425897. The cantilevers were fabricated in Stanford Nanofabrication Facility (SNF) by A. M. Fitzgerald and B. Chui in A. M. Fitzgerald & Associates, LLC, San Carlos, CA.en
dc.publisherAIP Publishingen
dc.titleTapping mode microwave impedance microscopyen
dc.typeArticleen
dc.identifier.journalReview of Scientific Instrumentsen
dc.contributor.institutionGeballe Laboratory for Advanced Materials, Stanford, United Statesen
dc.contributor.institutionStanford University, Palo Alto, United Statesen
kaust.grant.numberKUS-F1-033-02en

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