Solubility studies of inorganic–organic hybrid nanoparticle photoresists with different surface functional groups

Handle URI:
http://hdl.handle.net/10754/599658
Title:
Solubility studies of inorganic–organic hybrid nanoparticle photoresists with different surface functional groups
Authors:
Li, Li; Chakrabarty, Souvik; Jiang, Jing; Zhang, Ben; Ober, Christopher; Giannelis, Emmanuel P.
Abstract:
© 2016 The Royal Society of Chemistry. The solubility behavior of Hf and Zr based hybrid nanoparticles with different surface ligands in different concentrations of photoacid generator as potential EUV photoresists was investigated in detail. The nanoparticles regardless of core or ligand chemistry have a hydrodynamic diameter of 2-3 nm and a very narrow size distribution in organic solvents. The Hansen solubility parameters for nanoparticles functionalized with IBA and 2MBA have the highest contribution from the dispersion interaction than those with tDMA and MAA, which show more polar character. The nanoparticles functionalized with unsaturated surface ligands showed more apparent solubility changes after exposure to DUV than those with saturated ones. The solubility differences after exposure are more pronounced for films containing a higher amount of photoacid generator. The work reported here provides material selection criteria and processing strategies for the design of high performance EUV photoresists.
Citation:
Li L, Chakrabarty S, Jiang J, Zhang B, Ober C, et al. (2016) Solubility studies of inorganic–organic hybrid nanoparticle photoresists with different surface functional groups. Nanoscale 8: 1338–1343. Available: http://dx.doi.org/10.1039/c5nr07334k.
Publisher:
Royal Society of Chemistry (RSC)
Journal:
Nanoscale
Issue Date:
2016
DOI:
10.1039/c5nr07334k
PubMed ID:
26695121
Type:
Article
ISSN:
2040-3364; 2040-3372
Sponsors:
The authors gratefully acknowledge funding support from SEMATECH and facilities support from Lawrence Berkeley National Laboratory (LBNL), Cornell Nanoscale Science and Technology (CNF), the Cornell Center for Materials Research (CCMR) and the KAUST-Cornell Center of Energy and Sustainability (KAUST-CU).
Appears in Collections:
Publications Acknowledging KAUST Support

Full metadata record

DC FieldValue Language
dc.contributor.authorLi, Lien
dc.contributor.authorChakrabarty, Souviken
dc.contributor.authorJiang, Jingen
dc.contributor.authorZhang, Benen
dc.contributor.authorOber, Christopheren
dc.contributor.authorGiannelis, Emmanuel P.en
dc.date.accessioned2016-02-28T06:06:53Zen
dc.date.available2016-02-28T06:06:53Zen
dc.date.issued2016en
dc.identifier.citationLi L, Chakrabarty S, Jiang J, Zhang B, Ober C, et al. (2016) Solubility studies of inorganic–organic hybrid nanoparticle photoresists with different surface functional groups. Nanoscale 8: 1338–1343. Available: http://dx.doi.org/10.1039/c5nr07334k.en
dc.identifier.issn2040-3364en
dc.identifier.issn2040-3372en
dc.identifier.pmid26695121en
dc.identifier.doi10.1039/c5nr07334ken
dc.identifier.urihttp://hdl.handle.net/10754/599658en
dc.description.abstract© 2016 The Royal Society of Chemistry. The solubility behavior of Hf and Zr based hybrid nanoparticles with different surface ligands in different concentrations of photoacid generator as potential EUV photoresists was investigated in detail. The nanoparticles regardless of core or ligand chemistry have a hydrodynamic diameter of 2-3 nm and a very narrow size distribution in organic solvents. The Hansen solubility parameters for nanoparticles functionalized with IBA and 2MBA have the highest contribution from the dispersion interaction than those with tDMA and MAA, which show more polar character. The nanoparticles functionalized with unsaturated surface ligands showed more apparent solubility changes after exposure to DUV than those with saturated ones. The solubility differences after exposure are more pronounced for films containing a higher amount of photoacid generator. The work reported here provides material selection criteria and processing strategies for the design of high performance EUV photoresists.en
dc.description.sponsorshipThe authors gratefully acknowledge funding support from SEMATECH and facilities support from Lawrence Berkeley National Laboratory (LBNL), Cornell Nanoscale Science and Technology (CNF), the Cornell Center for Materials Research (CCMR) and the KAUST-Cornell Center of Energy and Sustainability (KAUST-CU).en
dc.publisherRoyal Society of Chemistry (RSC)en
dc.titleSolubility studies of inorganic–organic hybrid nanoparticle photoresists with different surface functional groupsen
dc.typeArticleen
dc.identifier.journalNanoscaleen
dc.contributor.institutionCornell University, Ithaca, United Statesen

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