Nanogenerators for self-powering nanosystems and piezotronics for smart MEMS/NEMS

Handle URI:
http://hdl.handle.net/10754/598936
Title:
Nanogenerators for self-powering nanosystems and piezotronics for smart MEMS/NEMS
Authors:
Wang, Zhong Lin
Abstract:
Two new fields are introduced to MEMS/NEMS: a nanogenerator that harvests mechanical energy for powering nanosystems, and strained induced piezotronics for smart MEMS. Fundamentally, due to the polarization of ions in a crystal that has non-central symmetry, such as ZnO, GaN and InN, a piezoelectric potential (piezopotential) is created in the crystal by applying a stress. The principle of harvesting irregular mechanical energy by the nanogenerator relies on the piezopotenital driven transient flow of electrons in external load, which can be resulted from body motion, muscle stretching, breathing, tiny mechanical vibration/disturbance, sonic wave etc. As of today, a gentle straining can output 1-3 V at an instant output power of ∼2 μW from an integrated nanogenerator of a very thin sheet of 1 cm2 in size. This technology has the potential applications for power MEMS/NEMS that requires a power in the μW to mW range. Furthermore, we have replaced the externally applied gate voltage to a CMOS field effect transistor by the strain induced piezopotential as a "gate" voltage to tune/control the charge transport from source to drain. The devices fabricated by this principle are called piezotronics, with applications in strain/force/pressure triggered/controlled electronic devices, sensors and logic units.
Citation:
Wang ZL (2011) Nanogenerators for self-powering nanosystems and piezotronics for smart MEMS/NEMS. 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems. Available: http://dx.doi.org/10.1109/MEMSYS.2011.5734375.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems
Issue Date:
Jan-2011
DOI:
10.1109/MEMSYS.2011.5734375
Type:
Conference Paper
Sponsors:
Thanks to the support from DARPA, BES DOE, NIH,NSF, Airforce, NASA, KAUST and WPI (NIMS). Thanksto my prior and current group members and collaboratorsfor their contributions.
Appears in Collections:
Publications Acknowledging KAUST Support

Full metadata record

DC FieldValue Language
dc.contributor.authorWang, Zhong Linen
dc.date.accessioned2016-02-25T13:44:03Zen
dc.date.available2016-02-25T13:44:03Zen
dc.date.issued2011-01en
dc.identifier.citationWang ZL (2011) Nanogenerators for self-powering nanosystems and piezotronics for smart MEMS/NEMS. 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems. Available: http://dx.doi.org/10.1109/MEMSYS.2011.5734375.en
dc.identifier.doi10.1109/MEMSYS.2011.5734375en
dc.identifier.urihttp://hdl.handle.net/10754/598936en
dc.description.abstractTwo new fields are introduced to MEMS/NEMS: a nanogenerator that harvests mechanical energy for powering nanosystems, and strained induced piezotronics for smart MEMS. Fundamentally, due to the polarization of ions in a crystal that has non-central symmetry, such as ZnO, GaN and InN, a piezoelectric potential (piezopotential) is created in the crystal by applying a stress. The principle of harvesting irregular mechanical energy by the nanogenerator relies on the piezopotenital driven transient flow of electrons in external load, which can be resulted from body motion, muscle stretching, breathing, tiny mechanical vibration/disturbance, sonic wave etc. As of today, a gentle straining can output 1-3 V at an instant output power of ∼2 μW from an integrated nanogenerator of a very thin sheet of 1 cm2 in size. This technology has the potential applications for power MEMS/NEMS that requires a power in the μW to mW range. Furthermore, we have replaced the externally applied gate voltage to a CMOS field effect transistor by the strain induced piezopotential as a "gate" voltage to tune/control the charge transport from source to drain. The devices fabricated by this principle are called piezotronics, with applications in strain/force/pressure triggered/controlled electronic devices, sensors and logic units.en
dc.description.sponsorshipThanks to the support from DARPA, BES DOE, NIH,NSF, Airforce, NASA, KAUST and WPI (NIMS). Thanksto my prior and current group members and collaboratorsfor their contributions.en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.titleNanogenerators for self-powering nanosystems and piezotronics for smart MEMS/NEMSen
dc.typeConference Paperen
dc.identifier.journal2011 IEEE 24th International Conference on Micro Electro Mechanical Systemsen
dc.contributor.institutionGeorgia Institute of Technology, Atlanta, United Statesen
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