Incidence Angle Effect of Energetic Carbon Ions on Deposition Rate, Topography, and Structure of Ultrathin Amorphous Carbon Films Deposited by Filtered Cathodic Vacuum Arc

Handle URI:
http://hdl.handle.net/10754/598605
Title:
Incidence Angle Effect of Energetic Carbon Ions on Deposition Rate, Topography, and Structure of Ultrathin Amorphous Carbon Films Deposited by Filtered Cathodic Vacuum Arc
Authors:
Wang, N.; Komvopoulos, K.
Abstract:
The effect of the incidence angle of energetic carbon ions on the thickness, topography, and structure of ultrathin amorphous carbon (a-C) films synthesized by filtered cathodic vacuum arc (FCVA) was examined in the context of numerical and experimental results. The thickness of a-C films deposited at different incidence angles was investigated in the light of Monte Carlo simulations, and the calculated depth profiles were compared with those obtained from high-resolution transmission electron microscopy (TEM). The topography and structure of the a-C films were studied by atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS), respectively. The film thickness decreased with the increase of the incidence angle, while the surface roughness increased and the content of tetrahedral carbon hybridization (sp 3) decreased significantly with the increase of the incidence angle above 45° , measured from the surface normal. TEM, AFM, and XPS results indicate that the smoothest and thinnest a-C films with the highest content of sp 3 carbon bonding were produced for an incidence angle of 45°. The findings of this study have direct implications in ultrahigh-density magnetic recording, where ultrathin and smooth a-C films with high sp 3 contents are of critical importance. © 2012 IEEE.
Citation:
Wang N, Komvopoulos K (2012) Incidence Angle Effect of Energetic Carbon Ions on Deposition Rate, Topography, and Structure of Ultrathin Amorphous Carbon Films Deposited by Filtered Cathodic Vacuum Arc. IEEE Transactions on Magnetics 48: 2220–2227. Available: http://dx.doi.org/10.1109/TMAG.2012.2190295.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
IEEE Transactions on Magnetics
Issue Date:
Jul-2012
DOI:
10.1109/TMAG.2012.2190295
Type:
Article
ISSN:
0018-9464; 1941-0069
Sponsors:
This research was funded by the Computer Mechanics Laboratory (CML) and the UCB-KAUST Academic Excellence Alliance (AEA) Program. TEM and XPS studies were performed at the National Center for Electron Microscopy and Molecular Foundry, respectively, Lawrence Berkeley National Laboratory, supported by the Director, Office of Science, Office of Basic Energy Sciences of the U.S. Department of Energy under Contract No. DE-AC02-05CH11231.
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Full metadata record

DC FieldValue Language
dc.contributor.authorWang, N.en
dc.contributor.authorKomvopoulos, K.en
dc.date.accessioned2016-02-25T13:32:59Zen
dc.date.available2016-02-25T13:32:59Zen
dc.date.issued2012-07en
dc.identifier.citationWang N, Komvopoulos K (2012) Incidence Angle Effect of Energetic Carbon Ions on Deposition Rate, Topography, and Structure of Ultrathin Amorphous Carbon Films Deposited by Filtered Cathodic Vacuum Arc. IEEE Transactions on Magnetics 48: 2220–2227. Available: http://dx.doi.org/10.1109/TMAG.2012.2190295.en
dc.identifier.issn0018-9464en
dc.identifier.issn1941-0069en
dc.identifier.doi10.1109/TMAG.2012.2190295en
dc.identifier.urihttp://hdl.handle.net/10754/598605en
dc.description.abstractThe effect of the incidence angle of energetic carbon ions on the thickness, topography, and structure of ultrathin amorphous carbon (a-C) films synthesized by filtered cathodic vacuum arc (FCVA) was examined in the context of numerical and experimental results. The thickness of a-C films deposited at different incidence angles was investigated in the light of Monte Carlo simulations, and the calculated depth profiles were compared with those obtained from high-resolution transmission electron microscopy (TEM). The topography and structure of the a-C films were studied by atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS), respectively. The film thickness decreased with the increase of the incidence angle, while the surface roughness increased and the content of tetrahedral carbon hybridization (sp 3) decreased significantly with the increase of the incidence angle above 45° , measured from the surface normal. TEM, AFM, and XPS results indicate that the smoothest and thinnest a-C films with the highest content of sp 3 carbon bonding were produced for an incidence angle of 45°. The findings of this study have direct implications in ultrahigh-density magnetic recording, where ultrathin and smooth a-C films with high sp 3 contents are of critical importance. © 2012 IEEE.en
dc.description.sponsorshipThis research was funded by the Computer Mechanics Laboratory (CML) and the UCB-KAUST Academic Excellence Alliance (AEA) Program. TEM and XPS studies were performed at the National Center for Electron Microscopy and Molecular Foundry, respectively, Lawrence Berkeley National Laboratory, supported by the Director, Office of Science, Office of Basic Energy Sciences of the U.S. Department of Energy under Contract No. DE-AC02-05CH11231.en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.subjectAmorphous carbonen
dc.subjectfiltered cathodic vacuum arcen
dc.subjecthybridizationen
dc.subjectstructureen
dc.subjectsurface topographyen
dc.subjectultrathin filmsen
dc.titleIncidence Angle Effect of Energetic Carbon Ions on Deposition Rate, Topography, and Structure of Ultrathin Amorphous Carbon Films Deposited by Filtered Cathodic Vacuum Arcen
dc.typeArticleen
dc.identifier.journalIEEE Transactions on Magneticsen
dc.contributor.institutionUC Berkeley, Berkeley, United Statesen
kaust.grant.programAcademic Excellence Alliance (AEA)en
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