A multi-axis electrothermal micromirror for a miniaturized OCT system

Handle URI:
http://hdl.handle.net/10754/597318
Title:
A multi-axis electrothermal micromirror for a miniaturized OCT system
Authors:
Izhar, U.; Izhar, A.B.; Tatic-Lucic, S.
Abstract:
We report on the development of a low power thermally actuated bi-axis SOI micromirror that is capable of performing angular and vertical scans for optical coherence tomography (OCT) applications. The device consists of a mirror with an aluminum coating over a 3 μm thick single crystal silicon base, aluminum/polysilicon electrothermal actuators with embedded heaters and polysilicon flexural connectors. In scanning mode, this mirror can satisfy our target specification of 5° angle at the low power of 1.7 mW with a temperature increase of 16.5 °C ± 7 °C from ambient in the actuator. Furthermore, a maximum angle of 32° has been achieved at 12 mW. In piston mode, it can reach vertical displacements of up to 131 μm at 12 mW with the temperature increase of 16.5 °C ± 7 °C from ambient in the actuator. The scanning speed for the mirror has been measured and the time response of the mirror is found to be 100 ms. The curvature of the mirror is found to be 2.4 mm ± 0.26 mm with a roughness of 100 nm ± 20 nm. Due to low driving power and moderate temperatures developed during its operation, this device can potentially be integrated with broadband light source, photodetector and interferometery system, to form a fully integrated OCT system on GaAs substrate. © 2011 Elsevier B.V. All rights reserved.
Citation:
Izhar U, Izhar AB, Tatic-Lucic S (2011) A multi-axis electrothermal micromirror for a miniaturized OCT system. Sensors and Actuators A: Physical 167: 152–161. Available: http://dx.doi.org/10.1016/j.sna.2011.04.003.
Publisher:
Elsevier BV
Journal:
Sensors and Actuators A: Physical
Issue Date:
Jun-2011
DOI:
10.1016/j.sna.2011.04.003
Type:
Article
ISSN:
0924-4247
Sponsors:
We are grateful to Professor Boon S. Ooi from division of physical science and engineering, King Abdullah University of science and technology, Saudi Arabia for his advice and support. This work was supported by PITA (Pennsylvania Infrastructure Technology Alliance), PIT-743-07 and the fabrication was performed in CNF (Cornell Nanoscale Science and Technology Facility) at Cornell University.
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Full metadata record

DC FieldValue Language
dc.contributor.authorIzhar, U.en
dc.contributor.authorIzhar, A.B.en
dc.contributor.authorTatic-Lucic, S.en
dc.date.accessioned2016-02-25T12:30:35Zen
dc.date.available2016-02-25T12:30:35Zen
dc.date.issued2011-06en
dc.identifier.citationIzhar U, Izhar AB, Tatic-Lucic S (2011) A multi-axis electrothermal micromirror for a miniaturized OCT system. Sensors and Actuators A: Physical 167: 152–161. Available: http://dx.doi.org/10.1016/j.sna.2011.04.003.en
dc.identifier.issn0924-4247en
dc.identifier.doi10.1016/j.sna.2011.04.003en
dc.identifier.urihttp://hdl.handle.net/10754/597318en
dc.description.abstractWe report on the development of a low power thermally actuated bi-axis SOI micromirror that is capable of performing angular and vertical scans for optical coherence tomography (OCT) applications. The device consists of a mirror with an aluminum coating over a 3 μm thick single crystal silicon base, aluminum/polysilicon electrothermal actuators with embedded heaters and polysilicon flexural connectors. In scanning mode, this mirror can satisfy our target specification of 5° angle at the low power of 1.7 mW with a temperature increase of 16.5 °C ± 7 °C from ambient in the actuator. Furthermore, a maximum angle of 32° has been achieved at 12 mW. In piston mode, it can reach vertical displacements of up to 131 μm at 12 mW with the temperature increase of 16.5 °C ± 7 °C from ambient in the actuator. The scanning speed for the mirror has been measured and the time response of the mirror is found to be 100 ms. The curvature of the mirror is found to be 2.4 mm ± 0.26 mm with a roughness of 100 nm ± 20 nm. Due to low driving power and moderate temperatures developed during its operation, this device can potentially be integrated with broadband light source, photodetector and interferometery system, to form a fully integrated OCT system on GaAs substrate. © 2011 Elsevier B.V. All rights reserved.en
dc.description.sponsorshipWe are grateful to Professor Boon S. Ooi from division of physical science and engineering, King Abdullah University of science and technology, Saudi Arabia for his advice and support. This work was supported by PITA (Pennsylvania Infrastructure Technology Alliance), PIT-743-07 and the fabrication was performed in CNF (Cornell Nanoscale Science and Technology Facility) at Cornell University.en
dc.publisherElsevier BVen
dc.subjectAngular deflectionen
dc.subjectElectrothermal actuatoren
dc.subjectMicromirroren
dc.subjectMulti-axis mirroren
dc.subjectOCT imagingen
dc.subjectOptical scanneren
dc.titleA multi-axis electrothermal micromirror for a miniaturized OCT systemen
dc.typeArticleen
dc.identifier.journalSensors and Actuators A: Physicalen
dc.contributor.institutionLehigh University, Bethlehem, United Statesen
dc.contributor.institutionUniversity of Engineering and Technology Lahore, Lahore, Pakistanen
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