77 GHz MEMS antennas on high-resistivity silicon for linear and circular polarization

Handle URI:
http://hdl.handle.net/10754/597218
Title:
77 GHz MEMS antennas on high-resistivity silicon for linear and circular polarization
Authors:
Sallam, M. O.; Soliman, E. A.; Hassan, S.; El Katteb, O.; Sedky, S.
Abstract:
Two new MEMS antennas operating at 77 GHz are presented in this paper. The first antenna is linearly polarized. It possesses a vertical silicon wall that carries a dipole on top of it. The wall is located on top of silicon substrate covered with a ground plane. The other side of the substrate carries a microstrip feeding network in the form of U-turn that causes 180 phase shift. This phase-shifter feeds the arms of the dipole antenna via two vertical Through-Silicon Vias (TSVs) that go through the entire wafer. The second antenna is circularly polarized and formed using two linearly polarized antennas spatially rotated with respect to each other by 90 and excited with 90 phase shift. Both antennas are fabricated using novel process flow on a single high-resistivity silicon wafer via bulk micromachining. Only three processing steps are required to fabricate these antennas. The proposed antennas have appealing characteristics, such as high polarization purity, high gain, and high radiation efficiency. © 2011 IEEE.
Citation:
Sallam MO, Soliman EA, Hassan S, El Katteb O, Sedky S (2011) 77 GHz MEMS antennas on high-resistivity silicon for linear and circular polarization. 2011 IEEE International Symposium on Antennas and Propagation (APSURSI). Available: http://dx.doi.org/10.1109/APS.2011.5996920.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
2011 IEEE International Symposium on Antennas and Propagation (APSURSI)
KAUST Grant Number:
UK-C0015
Issue Date:
Jul-2011
DOI:
10.1109/APS.2011.5996920
Type:
Conference Paper
Sponsors:
This publication is based on work supported by awardnumber: UK-C0015 OUK made by King Abdullah Universityof Science and Technology (KAUST).
Appears in Collections:
Publications Acknowledging KAUST Support

Full metadata record

DC FieldValue Language
dc.contributor.authorSallam, M. O.en
dc.contributor.authorSoliman, E. A.en
dc.contributor.authorHassan, S.en
dc.contributor.authorEl Katteb, O.en
dc.contributor.authorSedky, S.en
dc.date.accessioned2016-02-25T12:28:11Zen
dc.date.available2016-02-25T12:28:11Zen
dc.date.issued2011-07en
dc.identifier.citationSallam MO, Soliman EA, Hassan S, El Katteb O, Sedky S (2011) 77 GHz MEMS antennas on high-resistivity silicon for linear and circular polarization. 2011 IEEE International Symposium on Antennas and Propagation (APSURSI). Available: http://dx.doi.org/10.1109/APS.2011.5996920.en
dc.identifier.doi10.1109/APS.2011.5996920en
dc.identifier.urihttp://hdl.handle.net/10754/597218en
dc.description.abstractTwo new MEMS antennas operating at 77 GHz are presented in this paper. The first antenna is linearly polarized. It possesses a vertical silicon wall that carries a dipole on top of it. The wall is located on top of silicon substrate covered with a ground plane. The other side of the substrate carries a microstrip feeding network in the form of U-turn that causes 180 phase shift. This phase-shifter feeds the arms of the dipole antenna via two vertical Through-Silicon Vias (TSVs) that go through the entire wafer. The second antenna is circularly polarized and formed using two linearly polarized antennas spatially rotated with respect to each other by 90 and excited with 90 phase shift. Both antennas are fabricated using novel process flow on a single high-resistivity silicon wafer via bulk micromachining. Only three processing steps are required to fabricate these antennas. The proposed antennas have appealing characteristics, such as high polarization purity, high gain, and high radiation efficiency. © 2011 IEEE.en
dc.description.sponsorshipThis publication is based on work supported by awardnumber: UK-C0015 OUK made by King Abdullah Universityof Science and Technology (KAUST).en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.subjectBulk Micromachiningen
dc.subjectCircular Polarizationen
dc.subjectDipole Antennasen
dc.subjectLinear Polarizationen
dc.subjectMEMS Antennasen
dc.title77 GHz MEMS antennas on high-resistivity silicon for linear and circular polarizationen
dc.typeConference Paperen
dc.identifier.journal2011 IEEE International Symposium on Antennas and Propagation (APSURSI)en
dc.contributor.institutionAmerican University in Cairo, Cairo, Egypten
kaust.grant.numberUK-C0015en
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