Experimental investigation of snap-through motion of in-plane MEMS shallow arches under electrostatic excitation

Handle URI:
http://hdl.handle.net/10754/596016
Title:
Experimental investigation of snap-through motion of in-plane MEMS shallow arches under electrostatic excitation
Authors:
Ramini, Abdallah; Bellaredj, Mohammed L F; Al Hafiz, Md Abdullah; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We present an experimental investigation for the nonlinear dynamic behaviors of clamped–clamped in-plane MEMS shallow arches when excited by harmonic electrostatic forces. Frequency sweeps are conducted to study the dynamic behaviors in the neighborhoods of the first and third resonance frequencies as well as the super-harmonic resonances. Experimental results show local softening behavior of small oscillations around the first resonance frequency and hardening behavior at the third resonance frequency for small dc and ac loads. Interesting dynamic snap-through cross-well motions are observed experimentally at high voltages for the first time in the micro-scale world. In addition to the dynamic snap-through motion, the MEMS arch exhibits large oscillations of a continuous band of snap-through motion between the super-harmonic resonance regime and the first primary resonance regime. This continuous band is unprecedented experimentally in the micro/macro world, and is promising for a variety of sensing, actuation and communications applications.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Publisher:
IOP Publishing
Journal:
Journal of Micromechanics and Microengineering
Issue Date:
11-Dec-2015
DOI:
10.1088/0960-1317/26/1/015012
Type:
Article
Additional Links:
http://http://iopscience.iop.org/article/10.1088/0960-1317/26/1/015012/meta
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorRamini, Abdallahen
dc.contributor.authorBellaredj, Mohammed L Fen
dc.contributor.authorAl Hafiz, Md Abdullahen
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2016-02-10T12:48:11Zen
dc.date.available2016-02-10T12:48:11Zen
dc.date.issued2015-12-11en
dc.identifier.doi10.1088/0960-1317/26/1/015012en
dc.identifier.urihttp://hdl.handle.net/10754/596016en
dc.description.abstractWe present an experimental investigation for the nonlinear dynamic behaviors of clamped–clamped in-plane MEMS shallow arches when excited by harmonic electrostatic forces. Frequency sweeps are conducted to study the dynamic behaviors in the neighborhoods of the first and third resonance frequencies as well as the super-harmonic resonances. Experimental results show local softening behavior of small oscillations around the first resonance frequency and hardening behavior at the third resonance frequency for small dc and ac loads. Interesting dynamic snap-through cross-well motions are observed experimentally at high voltages for the first time in the micro-scale world. In addition to the dynamic snap-through motion, the MEMS arch exhibits large oscillations of a continuous band of snap-through motion between the super-harmonic resonance regime and the first primary resonance regime. This continuous band is unprecedented experimentally in the micro/macro world, and is promising for a variety of sensing, actuation and communications applications.en
dc.language.isoenen
dc.publisherIOP Publishingen
dc.relation.urlhttp://http://iopscience.iop.org/article/10.1088/0960-1317/26/1/015012/metaen
dc.subjectMechanical resonatoren
dc.subjectsnap throughen
dc.titleExperimental investigation of snap-through motion of in-plane MEMS shallow arches under electrostatic excitationen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalJournal of Micromechanics and Microengineeringen
dc.eprint.versionPost-printen
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)en
kaust.authorRamini, Abdallahen
kaust.authorBellaredj, Mohammed Lamine Faycalen
kaust.authorHafiz, Md Abdullah Alen
kaust.authorYounis, Mohammad I.en
All Items in KAUST are protected by copyright, with all rights reserved, unless otherwise indicated.