Experimental and analytical study of highly tunable electrostatically actuated resonant beams

Handle URI:
http://hdl.handle.net/10754/595578
Title:
Experimental and analytical study of highly tunable electrostatically actuated resonant beams
Authors:
Hajjaj, Amal Z.; Ramini, Abdallah; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We demonstrate theoretically and experimentally highly tunable clamped–clamped microbeam resonators actuated with electrostatic forces. Theoretically, the Galerkin procedure is used to solve for static deflection as well as the eigenvalue problem as a function of the dc voltage for different values of the ratio between the air gap and the thickness of the microbeam. We demonstrate theoretically and experimentally that the natural frequency of the microbeam can increase or decrease with the increase of the dc polarization voltage depending on the ratio between the air gap and the thickness. Hence, we show that unlike the classical softening effect of the dc voltage, by careful designs of the microbeams, the dc bias can be used to effectively increase the resonance frequencies by several factors. Experimental data are presented for two case studies of silicon beams showing the effective increase of their fundamental resonance frequencies by more than 50–80%. Excellent agreement is reported among the theoretical and experimental results.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
Experimental and analytical study of highly tunable electrostatically actuated resonant beams 2015, 25 (12):125015 Journal of Micromechanics and Microengineering
Publisher:
IOP Publishing
Journal:
Journal of Micromechanics and Microengineering
Issue Date:
3-Nov-2015
DOI:
10.1088/0960-1317/25/12/125015
Type:
Article
ISSN:
0960-1317; 1361-6439
Additional Links:
http://stacks.iop.org/0960-1317/25/i=12/a=125015?key=crossref.dcc5a389ba58b6051c109e7dd2d0dc81
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorHajjaj, Amal Z.en
dc.contributor.authorRamini, Abdallahen
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2016-02-04T13:18:41Zen
dc.date.available2016-02-04T13:18:41Zen
dc.date.issued2015-11-03en
dc.identifier.citationExperimental and analytical study of highly tunable electrostatically actuated resonant beams 2015, 25 (12):125015 Journal of Micromechanics and Microengineeringen
dc.identifier.issn0960-1317en
dc.identifier.issn1361-6439en
dc.identifier.doi10.1088/0960-1317/25/12/125015en
dc.identifier.urihttp://hdl.handle.net/10754/595578en
dc.description.abstractWe demonstrate theoretically and experimentally highly tunable clamped–clamped microbeam resonators actuated with electrostatic forces. Theoretically, the Galerkin procedure is used to solve for static deflection as well as the eigenvalue problem as a function of the dc voltage for different values of the ratio between the air gap and the thickness of the microbeam. We demonstrate theoretically and experimentally that the natural frequency of the microbeam can increase or decrease with the increase of the dc polarization voltage depending on the ratio between the air gap and the thickness. Hence, we show that unlike the classical softening effect of the dc voltage, by careful designs of the microbeams, the dc bias can be used to effectively increase the resonance frequencies by several factors. Experimental data are presented for two case studies of silicon beams showing the effective increase of their fundamental resonance frequencies by more than 50–80%. Excellent agreement is reported among the theoretical and experimental results.en
dc.language.isoenen
dc.publisherIOP Publishingen
dc.relation.urlhttp://stacks.iop.org/0960-1317/25/i=12/a=125015?key=crossref.dcc5a389ba58b6051c109e7dd2d0dc81en
dc.rightsArchived with thanks to Journal of Micromechanics and Microengineeringen
dc.titleExperimental and analytical study of highly tunable electrostatically actuated resonant beamsen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalJournal of Micromechanics and Microengineeringen
dc.eprint.versionPost-printen
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)en
kaust.authorHajjaj, Amal Z.en
kaust.authorRamini, Abdallahen
kaust.authorYounis, Mohammad I.en
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