MEMS mass-spring-damper systems using an out-of-plane suspension scheme

Handle URI:
http://hdl.handle.net/10754/594741
Title:
MEMS mass-spring-damper systems using an out-of-plane suspension scheme
Authors:
Abdel Aziz, Ahmed Kamal Said; Sharaf, Abdel Hameed; Serry, Mohamed Yousef; Sedky, Sherif Salah
Assignee:
King Abdullah University of Science and Technology
Abstract:
MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.
KAUST Department:
King Abdullah University of Science and Technology
Issue Date:
4-Feb-2014
Submitted date:
2010-05-27
Type:
Patent
Patent Number:
US 8640541 B2
Application Number:
US 20110030472 A1
Patent Status:
Granted Patent
Additional Links:
http://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8640541; http://assignment.uspto.gov/#/search?adv=patNum:8640541; http://www.google.com/patents/US8640541; http://worldwide.espacenet.com/publicationDetails/biblio?CC=US&NR=8640541B2&KC=B2&FT=D
Appears in Collections:
Patents

Full metadata record

DC FieldValue Language
dc.contributor.authorAbdel Aziz, Ahmed Kamal Saiden
dc.contributor.authorSharaf, Abdel Hameeden
dc.contributor.authorSerry, Mohamed Yousefen
dc.contributor.authorSedky, Sherif Salahen
dc.date.accessioned2016-01-24T10:41:12Zen
dc.date.available2016-01-24T10:41:12Zen
dc.date.issued2014-02-04en
dc.date.submitted2010-05-27en
dc.identifier.urihttp://hdl.handle.net/10754/594741en
dc.description.abstractMEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.en
dc.relation.urlhttp://patft.uspto.gov/netacgi/nph-Parser?patentnumber=8640541en
dc.relation.urlhttp://assignment.uspto.gov/#/search?adv=patNum:8640541en
dc.relation.urlhttp://www.google.com/patents/US8640541en
dc.relation.urlhttp://worldwide.espacenet.com/publicationDetails/biblio?CC=US&NR=8640541B2&KC=B2&FT=Den
dc.titleMEMS mass-spring-damper systems using an out-of-plane suspension schemeen
dc.typePatenten
dc.contributor.departmentKing Abdullah University of Science and Technologyen
dc.description.statusGranted Patenten
dc.contributor.assigneeKing Abdullah University of Science and Technologyen
dc.description.countryUnited Statesen
dc.identifier.patentnumberUS 8640541 B2en
dc.identifier.applicationnumberUS 20110030472 A1en
dc.identifier.uspatentnumber8640541en
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