Multiwavelength optical scatterometry of dielectric gratings

Handle URI:
http://hdl.handle.net/10754/594171
Title:
Multiwavelength optical scatterometry of dielectric gratings
Authors:
Yashina, Nataliya P.; Melezhik, Petr N.; Sirenko, Kostyantyn; Granet, Gerard
Abstract:
Modern scatterometry problems arising in the lithography production of periodic gratings are in the focus of the work. The performance capabilities of a novel theoretical and numerical modeling oriented to these problems are considered. The approach is based on rigorous solutions of 2-D initial boundary value problems of the gratings theory. The quintessence and advantage of the method is the possibility to perform an efficient analysis simultaneously and interactively both for steady state and transient processes of the resonant scattering of electromagnetic waves by the infinite and compact periodic structures. © 2012 IEEE.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
Yashina NP, Melezhik PN, Sirenko KY, Granet G (2012) Multiwavelength optical scatterometry of dielectric gratings. 2012 International Conference on Mathematical Methods in Electromagnetic Theory. Available: http://dx.doi.org/10.1109/mmet.2012.6331241.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
2012 International Conference on Mathematical Methods in Electromagnetic Theory
Conference/Event name:
14th International Conference on Mathematical Methods in Electromagnetic Theory, MMET 2012
Issue Date:
Aug-2012
DOI:
10.1109/mmet.2012.6331241
Type:
Conference Paper
ISBN:
9781467344791
Appears in Collections:
Conference Papers; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorYashina, Nataliya P.en
dc.contributor.authorMelezhik, Petr N.en
dc.contributor.authorSirenko, Kostyantynen
dc.contributor.authorGranet, Gerarden
dc.date.accessioned2016-01-19T13:23:07Zen
dc.date.available2016-01-19T13:23:07Zen
dc.date.issued2012-08en
dc.identifier.citationYashina NP, Melezhik PN, Sirenko KY, Granet G (2012) Multiwavelength optical scatterometry of dielectric gratings. 2012 International Conference on Mathematical Methods in Electromagnetic Theory. Available: http://dx.doi.org/10.1109/mmet.2012.6331241.en
dc.identifier.isbn9781467344791en
dc.identifier.doi10.1109/mmet.2012.6331241en
dc.identifier.urihttp://hdl.handle.net/10754/594171en
dc.description.abstractModern scatterometry problems arising in the lithography production of periodic gratings are in the focus of the work. The performance capabilities of a novel theoretical and numerical modeling oriented to these problems are considered. The approach is based on rigorous solutions of 2-D initial boundary value problems of the gratings theory. The quintessence and advantage of the method is the possibility to perform an efficient analysis simultaneously and interactively both for steady state and transient processes of the resonant scattering of electromagnetic waves by the infinite and compact periodic structures. © 2012 IEEE.en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.titleMultiwavelength optical scatterometry of dielectric gratingsen
dc.typeConference Paperen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journal2012 International Conference on Mathematical Methods in Electromagnetic Theoryen
dc.conference.date28 August 2012 through 30 August 2012en
dc.conference.name14th International Conference on Mathematical Methods in Electromagnetic Theory, MMET 2012en
dc.conference.locationKharkiven
dc.contributor.institutionInstitute of Radiophysics and Electronics, National Academy of Sciences of Ukraine, 12 Acad. Proskura str., Kharkiv, 61085, Ukraineen
dc.contributor.institutionBlaise Pascal University, LASMEA, 24 Av. des Landais, 63177, Aubiere Cedex, Franceen
kaust.authorSirenko, Kostyantynen
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