Dynamics of an Imperfect Microbeam Considering its Exact Shape

Handle URI:
http://hdl.handle.net/10754/593277
Title:
Dynamics of an Imperfect Microbeam Considering its Exact Shape
Authors:
Bataineh, Ahmad M.; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We study the static and dynamic behavior of electrically actuated micromachined arches. First, we conduct experiments on micromachined polysilicon beams by driving them electrically and varying their amplitude and frequency of voltage loads. The results reveal several interesting nonlinear phenomena of jumps, hysteresis, and softening behaviors. Next, we conduct analytical and theoretical investigation to understand the experiments. First, we solve the Eigen value problem analytically. We study the effect of the initial rise on the natural frequency and mode shapes, and use a Galerkin-based procedure to derive a reduced order model, which is then used to solve both the static and dynamic responses. We use two symmetric modes in the reduced order model to have accurate and converged results. We use long time integration to solve the nonlinear ordinary differential equations, and then modify our model using effective length to match experimental results. To further improve the matching with the experimental data, we curve-fit the exact profile of the microbeam to match the experimentally measured profile and use it in the reduced-order model to generate frequency-response curves. Finally, we use another numerical technique, the shooting technique, to solve the nonlinear ordinary differential equations. By using shooting and the curve fitted function, we found that we get good agreement with the experimental data.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Publisher:
ASME International
Journal:
Volume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystems
Conference/Event name:
ASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
Issue Date:
17-Aug-2014
DOI:
10.1115/DETC2014-34917
Type:
Conference Paper
Additional Links:
http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?doi=10.1115/DETC2014-34917
Appears in Collections:
Conference Papers; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorBataineh, Ahmad M.en
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2016-01-11T13:29:48Zen
dc.date.available2016-01-11T13:29:48Zen
dc.date.issued2014-08-17en
dc.identifier.doi10.1115/DETC2014-34917en
dc.identifier.urihttp://hdl.handle.net/10754/593277en
dc.description.abstractWe study the static and dynamic behavior of electrically actuated micromachined arches. First, we conduct experiments on micromachined polysilicon beams by driving them electrically and varying their amplitude and frequency of voltage loads. The results reveal several interesting nonlinear phenomena of jumps, hysteresis, and softening behaviors. Next, we conduct analytical and theoretical investigation to understand the experiments. First, we solve the Eigen value problem analytically. We study the effect of the initial rise on the natural frequency and mode shapes, and use a Galerkin-based procedure to derive a reduced order model, which is then used to solve both the static and dynamic responses. We use two symmetric modes in the reduced order model to have accurate and converged results. We use long time integration to solve the nonlinear ordinary differential equations, and then modify our model using effective length to match experimental results. To further improve the matching with the experimental data, we curve-fit the exact profile of the microbeam to match the experimentally measured profile and use it in the reduced-order model to generate frequency-response curves. Finally, we use another numerical technique, the shooting technique, to solve the nonlinear ordinary differential equations. By using shooting and the curve fitted function, we found that we get good agreement with the experimental data.en
dc.publisherASME Internationalen
dc.relation.urlhttp://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?doi=10.1115/DETC2014-34917en
dc.titleDynamics of an Imperfect Microbeam Considering its Exact Shapeen
dc.typeConference Paperen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalVolume 4: 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- and Nanosystemsen
dc.conference.dateAugust 17–20, 2014en
dc.conference.nameASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conferenceen
dc.conference.locationBuffalo, New York, USAen
dc.eprint.versionPublisher's Version/PDFen
dc.contributor.institutionState University of New York, Binghamton, NYen
kaust.authorYounis, Mohammad I.en
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