Investigation of the Dynamics of a Clamped-Clamped Microbeam Near the Third Mode Using a Partial Electrode

Handle URI:
http://hdl.handle.net/10754/593273
Title:
Investigation of the Dynamics of a Clamped-Clamped Microbeam Near the Third Mode Using a Partial Electrode
Authors:
Masri, Karim M.; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We present an investigation of the dynamics of a clamped-clamped microbeam excited electrostatically near its third mode. To maximize the response at the third mode, a partial electrode configuration is utilized. A multi-mode Galerkin method is used to develop a reduced order model (ROM) of the beam. A shooting method to find the periodic motion is utilized to generate frequency response curves. The curves show hardenining behavior and dynamic pull-in. We show that the dynamic amplitude of the partial configuration is higher than that of a full electrode configuration. These results are promising for the use of higher-order modes for mass detection and for ultra sensitive resonant sensors.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Publisher:
ASME International
Journal:
Volume 6: 10th International Conference on Multibody Systems, Nonlinear Dynamics, and Control
Conference/Event name:
ASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
Issue Date:
17-Aug-2014
DOI:
10.1115/DETC2014-34923
Type:
Conference Paper
Additional Links:
http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?doi=10.1115/DETC2014-34923
Appears in Collections:
Conference Papers; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorMasri, Karim M.en
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2016-01-11T13:27:00Zen
dc.date.available2016-01-11T13:27:00Zen
dc.date.issued2014-08-17en
dc.identifier.doi10.1115/DETC2014-34923en
dc.identifier.urihttp://hdl.handle.net/10754/593273en
dc.description.abstractWe present an investigation of the dynamics of a clamped-clamped microbeam excited electrostatically near its third mode. To maximize the response at the third mode, a partial electrode configuration is utilized. A multi-mode Galerkin method is used to develop a reduced order model (ROM) of the beam. A shooting method to find the periodic motion is utilized to generate frequency response curves. The curves show hardenining behavior and dynamic pull-in. We show that the dynamic amplitude of the partial configuration is higher than that of a full electrode configuration. These results are promising for the use of higher-order modes for mass detection and for ultra sensitive resonant sensors.en
dc.publisherASME Internationalen
dc.relation.urlhttp://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?doi=10.1115/DETC2014-34923en
dc.titleInvestigation of the Dynamics of a Clamped-Clamped Microbeam Near the Third Mode Using a Partial Electrodeen
dc.typeConference Paperen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalVolume 6: 10th International Conference on Multibody Systems, Nonlinear Dynamics, and Controlen
dc.conference.dateAugust 17–20, 2014en
dc.conference.nameASME 2014 International Design Engineering Technical Conferences and Computers and Information in Engineering Conferenceen
dc.conference.locationBuffalo, New York, USAen
dc.eprint.versionPublisher's Version/PDFen
dc.contributor.institutionState University of New York, Binghamton, NYen
kaust.authorYounis, Mohammad I.en
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