Torsion based universal MEMS logic device

Handle URI:
http://hdl.handle.net/10754/581766
Title:
Torsion based universal MEMS logic device
Authors:
Ilyas, Saad ( 0000-0002-9389-9718 ) ; Carreno, Armando Arpys Arevalo ( 0000-0001-9446-3310 ) ; Bayes, Ernesto; Foulds, Ian G.; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
In this work we demonstrate torsion based complementary MEMS logic device, which is capable, of performing INVERTER, AND, NAND, NOR, and OR gates using one physical structure within an operating range of 0-10 volts. It can also perform XOR and XNOR with one access inverter using the same structure with different electrical interconnects. The paper presents modeling, fabrication and experimental calculations of various performance features of the device including lifetime, power consumption and resonance frequency. The fabricated device is 535 μm by 150 μm with a gap of 1.92 μm and a resonant frequency of 6.51 kHz. The device is capable of performing the switching operation with a frequency of 1 kHz.
KAUST Department:
Physical Sciences and Engineering (PSE) Division; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Citation:
Torsion based universal MEMS logic device 2015 Sensors and Actuators A: Physical
Publisher:
Elsevier BV
Journal:
Sensors and Actuators A: Physical
Issue Date:
28-Oct-2015
DOI:
10.1016/j.sna.2015.10.039
Type:
Article
ISSN:
09244247
Additional Links:
http://linkinghub.elsevier.com/retrieve/pii/S0924424715302004
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorIlyas, Saaden
dc.contributor.authorCarreno, Armando Arpys Arevaloen
dc.contributor.authorBayes, Ernestoen
dc.contributor.authorFoulds, Ian G.en
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2015-11-05T06:23:04Zen
dc.date.available2015-11-05T06:23:04Zen
dc.date.issued2015-10-28en
dc.identifier.citationTorsion based universal MEMS logic device 2015 Sensors and Actuators A: Physicalen
dc.identifier.issn09244247en
dc.identifier.doi10.1016/j.sna.2015.10.039en
dc.identifier.urihttp://hdl.handle.net/10754/581766en
dc.description.abstractIn this work we demonstrate torsion based complementary MEMS logic device, which is capable, of performing INVERTER, AND, NAND, NOR, and OR gates using one physical structure within an operating range of 0-10 volts. It can also perform XOR and XNOR with one access inverter using the same structure with different electrical interconnects. The paper presents modeling, fabrication and experimental calculations of various performance features of the device including lifetime, power consumption and resonance frequency. The fabricated device is 535 μm by 150 μm with a gap of 1.92 μm and a resonant frequency of 6.51 kHz. The device is capable of performing the switching operation with a frequency of 1 kHz.en
dc.language.isoenen
dc.publisherElsevier BVen
dc.relation.urlhttp://linkinghub.elsevier.com/retrieve/pii/S0924424715302004en
dc.rightsNOTICE: this is the author’s version of a work that was accepted for publication in Sensors and Actuators A: Physical. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Sensors and Actuators A: Physical, 28 October 2015. DOI: 10.1016/j.sna.2015.10.039en
dc.subjectLogic Deviceen
dc.subjectMicromirroren
dc.subjectPolyimideen
dc.titleTorsion based universal MEMS logic deviceen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.identifier.journalSensors and Actuators A: Physicalen
dc.eprint.versionPost-printen
dc.contributor.institutionUniversity of British Columbia, School of Engineering, Okanagan Campus, British Columbia V1 V 1V7, Canadaen
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)en
kaust.authorIlyas, Saaden
kaust.authorCarreno, Armando Arpys Arevaloen
kaust.authorBayes, Ernestoen
kaust.authorFoulds, Ian G.en
kaust.authorYounis, Mohammad I.en
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