Dynamics of a clamped–clamped microbeam resonator considering fabrication imperfections

Handle URI:
http://hdl.handle.net/10754/580025
Title:
Dynamics of a clamped–clamped microbeam resonator considering fabrication imperfections
Authors:
Bataineh, Ahmad M.; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We present an investigation into the static and dynamic behavior of an electrostatically actuated clamped–clamped polysilicon microbeam resonator accounting for its fabrication imperfections, which are commonly encountered in similar microstructures. These are mainly because of the initial deformation of the beam due to stress gradient and its flexible anchors. First, we show experimental data of the microbeam when driven electrically by varying the amplitude and frequency of the voltage loads. The results reveal several interesting nonlinear phenomena of jumps, hysteresis, and softening behaviors. Theoretical investigation is then conducted to model the microbeam, and hence, interpret the experimental data. We solve the Eigen value problem governing the natural frequencies analytically. We then utilize a Galerkin-based procedure to derive a reduced order model, which is then used to simulate both the static and dynamic responses. To achieve good matching between theory and experiment, we show that the exact profile of the deformed beam needs to be utilized in the reduced order model, as measured from the optical profiler, combined with a shooting technique simulation, which is capable of tracing the resonant frequency branches under very-low damping conditions.
KAUST Department:
Mechanical Engineering Program
Citation:
Dynamics of a clamped–clamped microbeam resonator considering fabrication imperfections 2014, 21 (11):2425 Microsystem Technologies
Publisher:
Springer Science + Business Media
Journal:
Microsystem Technologies
Issue Date:
18-Oct-2014
DOI:
10.1007/s00542-014-2349-7
Type:
Article
ISSN:
0946-7076; 1432-1858
Additional Links:
http://link.springer.com/10.1007/s00542-014-2349-7
Appears in Collections:
Articles; Mechanical Engineering Program

Full metadata record

DC FieldValue Language
dc.contributor.authorBataineh, Ahmad M.en
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2015-10-21T08:55:13Zen
dc.date.available2015-10-21T08:55:13Zen
dc.date.issued2014-10-18en
dc.identifier.citationDynamics of a clamped–clamped microbeam resonator considering fabrication imperfections 2014, 21 (11):2425 Microsystem Technologiesen
dc.identifier.issn0946-7076en
dc.identifier.issn1432-1858en
dc.identifier.doi10.1007/s00542-014-2349-7en
dc.identifier.urihttp://hdl.handle.net/10754/580025en
dc.description.abstractWe present an investigation into the static and dynamic behavior of an electrostatically actuated clamped–clamped polysilicon microbeam resonator accounting for its fabrication imperfections, which are commonly encountered in similar microstructures. These are mainly because of the initial deformation of the beam due to stress gradient and its flexible anchors. First, we show experimental data of the microbeam when driven electrically by varying the amplitude and frequency of the voltage loads. The results reveal several interesting nonlinear phenomena of jumps, hysteresis, and softening behaviors. Theoretical investigation is then conducted to model the microbeam, and hence, interpret the experimental data. We solve the Eigen value problem governing the natural frequencies analytically. We then utilize a Galerkin-based procedure to derive a reduced order model, which is then used to simulate both the static and dynamic responses. To achieve good matching between theory and experiment, we show that the exact profile of the deformed beam needs to be utilized in the reduced order model, as measured from the optical profiler, combined with a shooting technique simulation, which is capable of tracing the resonant frequency branches under very-low damping conditions.en
dc.language.isoenen
dc.publisherSpringer Science + Business Mediaen
dc.relation.urlhttp://link.springer.com/10.1007/s00542-014-2349-7en
dc.rightsThe final publication is available at Springer via http://dx.doi.org/10.1007/s00542-014-2349-7en
dc.titleDynamics of a clamped–clamped microbeam resonator considering fabrication imperfectionsen
dc.typeArticleen
dc.contributor.departmentMechanical Engineering Programen
dc.identifier.journalMicrosystem Technologiesen
dc.eprint.versionPost-printen
dc.contributor.institutionDepartment of Mechanical Engineering, Jordan University of Science and Technology, Irbid, 22110, Jordanen
dc.contributor.institutionDepartment of Mechanical Engineering, State University of New York at Binghamton, Binghamton, NY, 13902, USAen
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)en
kaust.authorYounis, Mohammad I.en
All Items in KAUST are protected by copyright, with all rights reserved, unless otherwise indicated.