An Experimental and Theoretical Investigation of a Micromirror Under Mixed-Frequency Excitation

Handle URI:
http://hdl.handle.net/10754/578781
Title:
An Experimental and Theoretical Investigation of a Micromirror Under Mixed-Frequency Excitation
Authors:
Ilyas, Saad ( 0000-0002-9389-9718 ) ; Ramini, Abdallah; Carreno, Armando Arpys Arevalo ( 0000-0001-9446-3310 ) ; Younis, Mohammad I. ( 0000-0002-9491-1838 )
Abstract:
We present an experimental and theoretical investigation of a micromachined mirror under a mixed-frequency signal composed of two harmonic ac sources. The micromirror is made of polyimide as the main structural layer. The experimental and theoretical dynamics are explored via frequency sweeps in the desired neighborhoods. One frequency is fixed while the other frequency is swept through a wide range to study the dynamic responses. To simulate the behavior of the micromirror, it is modeled as a single degree of freedom system, where the parameters of the model are extracted experimentally. A good agreement is reported among the simulation results and the experimental data. These responses are studied under different frequencies and input voltages. The results show interesting dynamics, where the system exhibits primary resonance and combination resonances of additive and subtractive type. The mixed excitation is demonstrated as a way to increase the bandwidth of the resonator near primary resonance, which can be promising for resonant sensing applications in the effort to increase the signal-noise ratio over extended frequency range.
KAUST Department:
Mechanical Engineering Program; Physical Sciences and Engineering (PSE) Division
Citation:
An Experimental and Theoretical Investigation of a Micromirror Under Mixed-Frequency Excitation 2015, 24 (4):1124 Journal of Microelectromechanical Systems
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
Journal of Microelectromechanical Systems
Issue Date:
12-Jan-2015
DOI:
10.1109/JMEMS.2014.2386285
Type:
Article
ISSN:
1057-7157; 1941-0158
Additional Links:
http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7006680
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program

Full metadata record

DC FieldValue Language
dc.contributor.authorIlyas, Saaden
dc.contributor.authorRamini, Abdallahen
dc.contributor.authorCarreno, Armando Arpys Arevaloen
dc.contributor.authorYounis, Mohammad I.en
dc.date.accessioned2015-09-28T09:20:40Zen
dc.date.available2015-09-28T09:20:40Zen
dc.date.issued2015-01-12en
dc.identifier.citationAn Experimental and Theoretical Investigation of a Micromirror Under Mixed-Frequency Excitation 2015, 24 (4):1124 Journal of Microelectromechanical Systemsen
dc.identifier.issn1057-7157en
dc.identifier.issn1941-0158en
dc.identifier.doi10.1109/JMEMS.2014.2386285en
dc.identifier.urihttp://hdl.handle.net/10754/578781en
dc.description.abstractWe present an experimental and theoretical investigation of a micromachined mirror under a mixed-frequency signal composed of two harmonic ac sources. The micromirror is made of polyimide as the main structural layer. The experimental and theoretical dynamics are explored via frequency sweeps in the desired neighborhoods. One frequency is fixed while the other frequency is swept through a wide range to study the dynamic responses. To simulate the behavior of the micromirror, it is modeled as a single degree of freedom system, where the parameters of the model are extracted experimentally. A good agreement is reported among the simulation results and the experimental data. These responses are studied under different frequencies and input voltages. The results show interesting dynamics, where the system exhibits primary resonance and combination resonances of additive and subtractive type. The mixed excitation is demonstrated as a way to increase the bandwidth of the resonator near primary resonance, which can be promising for resonant sensing applications in the effort to increase the signal-noise ratio over extended frequency range.en
dc.language.isoenen
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.relation.urlhttp://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=7006680en
dc.rights(c) 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.en
dc.subjectMicro mirroren
dc.subjectbandwidthen
dc.subjectelectrostatic actuationen
dc.subjectmixed-frequency excitationen
dc.subjectmulti-frequency excitationen
dc.subjectpolyimideen
dc.subjectresonatorsen
dc.titleAn Experimental and Theoretical Investigation of a Micromirror Under Mixed-Frequency Excitationen
dc.typeArticleen
dc.contributor.departmentMechanical Engineering Programen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalJournal of Microelectromechanical Systemsen
dc.eprint.versionPost-printen
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)en
kaust.authorRamini, Abdallahen
kaust.authorYounis, Mohammad I.en
kaust.authorIlyas, Saaden
kaust.authorCarreno, Armando Arpys Arevaloen
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