Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator

Handle URI:
http://hdl.handle.net/10754/577143
Title:
Towards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuator
Authors:
Carreno, Armando Arpys Arevalo ( 0000-0001-9446-3310 ) ; Conchouso Gonzalez, David ( 0000-0002-9788-0977 ) ; Castro, David; Jaber, Nizar; Younis, Mohammad I. ( 0000-0002-9491-1838 ) ; Foulds, Ian G.
Abstract:
In this paper we report the fabrication and characterization of a single piezoelectric actuator for digital sound reconstruction. This work is the first step towards the implementation of a true digital micro-loudspeaker by means of an array of acoustic actuators. These actuators consist of a flexible membrane fabricated using polyimide, which is actuated using a Lead-Zirconate-Titanate (PZT) piezoelectric ceramic layer working in the d31 actuation mode. The dimensions of the membrane are of 1mm diameter and 4μm in thickness, which is capable of being symmetrically actuated in both upward and downward directions, due to the back etch step releasing the membrane. Our electrical characterization shows an improvement in the polarization of the piezoelectric material after its final etch patterning step, and our mechanical characterization shows the natural modes of resonance of the stacked membrane. © 2015 IEEE.
KAUST Department:
Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Publisher:
Institute of Electrical & Electronics Engineers (IEEE)
Journal:
10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Conference/Event name:
10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
Issue Date:
Apr-2015
DOI:
10.1109/NEMS.2015.7147429
Type:
Conference Paper
Appears in Collections:
Conference Papers; Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorCarreno, Armando Arpys Arevaloen
dc.contributor.authorConchouso Gonzalez, Daviden
dc.contributor.authorCastro, Daviden
dc.contributor.authorJaber, Nizaren
dc.contributor.authorYounis, Mohammad I.en
dc.contributor.authorFoulds, Ian G.en
dc.date.accessioned2015-09-10T14:19:55Zen
dc.date.available2015-09-10T14:19:55Zen
dc.date.issued2015-04en
dc.identifier.doi10.1109/NEMS.2015.7147429en
dc.identifier.urihttp://hdl.handle.net/10754/577143en
dc.description.abstractIn this paper we report the fabrication and characterization of a single piezoelectric actuator for digital sound reconstruction. This work is the first step towards the implementation of a true digital micro-loudspeaker by means of an array of acoustic actuators. These actuators consist of a flexible membrane fabricated using polyimide, which is actuated using a Lead-Zirconate-Titanate (PZT) piezoelectric ceramic layer working in the d31 actuation mode. The dimensions of the membrane are of 1mm diameter and 4μm in thickness, which is capable of being symmetrically actuated in both upward and downward directions, due to the back etch step releasing the membrane. Our electrical characterization shows an improvement in the polarization of the piezoelectric material after its final etch patterning step, and our mechanical characterization shows the natural modes of resonance of the stacked membrane. © 2015 IEEE.en
dc.publisherInstitute of Electrical & Electronics Engineers (IEEE)en
dc.titleTowards a digital sound reconstruction MEMS device: Characterization of a single PZT based piezoelectric actuatoren
dc.typeConference Paperen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.contributor.departmentMechanical Engineering Programen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.identifier.journal10th IEEE International Conference on Nano/Micro Engineered and Molecular Systemsen
dc.conference.date7 April 2015 through 11 April 2015en
dc.conference.name10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015en
dc.contributor.institutionUniversity of British Columbia (UBC) Kelenowa, Canadaen
kaust.authorYounis, Mohammad I.en
kaust.authorFoulds, Ian G.en
kaust.authorCarreno, Armando Arpys Arevaloen
kaust.authorConchouso Gonzalez, Daviden
kaust.authorCastro, Daviden
kaust.authorJaber, Nizaren
All Items in KAUST are protected by copyright, with all rights reserved, unless otherwise indicated.