Out-of-plane platforms with bi-directional thermal bimorph actuation for transducer applications

Handle URI:
http://hdl.handle.net/10754/577132
Title:
Out-of-plane platforms with bi-directional thermal bimorph actuation for transducer applications
Authors:
Conchouso Gonzalez, David ( 0000-0002-9788-0977 ) ; Carreno, Armando Arpys Arevalo ( 0000-0001-9446-3310 ) ; Castro, D.; Foulds, Ian G.
Abstract:
This paper reports on the Buckled Cantilever Platform (BCP) that allows the manipulation of the out of plane structures through the adjustment of the pitch angle using thermal bimorph micro-Actuators. Due to the micro-fabrication process used, the bimorph actuators can be designed to move in both: Counter Clockwise (CCW) and Clockwise (CW) directions with a resolution of up to 110 μm/V, with smallest step in the range of nanometers. Thermal and electrical characterization of the thermal bimorph actuators showed low influence in the platforms temperature and low power consumption (< 35μW) mainly due to the natural isolation of the structure. Tip displacements larger than 500μm were achieved. The precise angle adjustment achieved through these mechanisms makes them optimal for a range of different MEMS applications, like optical benches and low frequency sweeping sensors and antennas. © 2015 IEEE.
KAUST Department:
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Conference/Event name:
10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015
Issue Date:
Apr-2015
DOI:
10.1109/NEMS.2015.7147503
Type:
Conference Paper
Appears in Collections:
Conference Papers; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorConchouso Gonzalez, Daviden
dc.contributor.authorCarreno, Armando Arpys Arevaloen
dc.contributor.authorCastro, D.en
dc.contributor.authorFoulds, Ian G.en
dc.date.accessioned2015-09-10T14:19:26Zen
dc.date.available2015-09-10T14:19:26Zen
dc.date.issued2015-04en
dc.identifier.doi10.1109/NEMS.2015.7147503en
dc.identifier.urihttp://hdl.handle.net/10754/577132en
dc.description.abstractThis paper reports on the Buckled Cantilever Platform (BCP) that allows the manipulation of the out of plane structures through the adjustment of the pitch angle using thermal bimorph micro-Actuators. Due to the micro-fabrication process used, the bimorph actuators can be designed to move in both: Counter Clockwise (CCW) and Clockwise (CW) directions with a resolution of up to 110 μm/V, with smallest step in the range of nanometers. Thermal and electrical characterization of the thermal bimorph actuators showed low influence in the platforms temperature and low power consumption (< 35μW) mainly due to the natural isolation of the structure. Tip displacements larger than 500μm were achieved. The precise angle adjustment achieved through these mechanisms makes them optimal for a range of different MEMS applications, like optical benches and low frequency sweeping sensors and antennas. © 2015 IEEE.en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.titleOut-of-plane platforms with bi-directional thermal bimorph actuation for transducer applicationsen
dc.typeConference Paperen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.identifier.journal10th IEEE International Conference on Nano/Micro Engineered and Molecular Systemsen
dc.conference.date7 April 2015 through 11 April 2015en
dc.conference.name10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015en
dc.contributor.institutionUniversity of British Columbia (UBC) Kelenowa, Canadaen
kaust.authorFoulds, Ian G.en
kaust.authorConchouso Gonzalez, Daviden
kaust.authorCarreno, Armando Arpys Arevaloen
All Items in KAUST are protected by copyright, with all rights reserved, unless otherwise indicated.