Characterization of imprinted gratings based on transparent materials by transmission scatterometry

Handle URI:
http://hdl.handle.net/10754/575696
Title:
Characterization of imprinted gratings based on transparent materials by transmission scatterometry
Authors:
Pietroy, David; Gereige, Issam; Gourgon, Cécile
Abstract:
Transmission scatterometry is studied as a characterization tool for gratings nanoimprinted in a resist layer spincoated on the top of a transparent substrate. In this case, the larger part of the incident signal is transmitted which can make the reflection analysis harder. Although the backward reflections in the substrate induce an error which is difficult to correct, results are shown to be in good agreement with SEM measurements and reflection mode scatteromerty. © 2013 Elsevier B.V. All rights reserved.
KAUST Department:
Solar and Photovoltaic Engineering Research Center (SPERC)
Publisher:
Elsevier BV
Journal:
Microelectronic Engineering
Issue Date:
Jun-2013
DOI:
10.1016/j.mee.2013.02.052
Type:
Article
ISSN:
01679317
Sponsors:
This work is supported by the NaPANIL European project.
Appears in Collections:
Articles; Solar and Photovoltaic Engineering Research Center (SPERC)

Full metadata record

DC FieldValue Language
dc.contributor.authorPietroy, Daviden
dc.contributor.authorGereige, Issamen
dc.contributor.authorGourgon, Cécileen
dc.date.accessioned2015-08-24T08:36:02Zen
dc.date.available2015-08-24T08:36:02Zen
dc.date.issued2013-06en
dc.identifier.issn01679317en
dc.identifier.doi10.1016/j.mee.2013.02.052en
dc.identifier.urihttp://hdl.handle.net/10754/575696en
dc.description.abstractTransmission scatterometry is studied as a characterization tool for gratings nanoimprinted in a resist layer spincoated on the top of a transparent substrate. In this case, the larger part of the incident signal is transmitted which can make the reflection analysis harder. Although the backward reflections in the substrate induce an error which is difficult to correct, results are shown to be in good agreement with SEM measurements and reflection mode scatteromerty. © 2013 Elsevier B.V. All rights reserved.en
dc.description.sponsorshipThis work is supported by the NaPANIL European project.en
dc.publisherElsevier BVen
dc.subjectNanoimprint lithographyen
dc.subjectOptical scatterometryen
dc.titleCharacterization of imprinted gratings based on transparent materials by transmission scatterometryen
dc.typeArticleen
dc.contributor.departmentSolar and Photovoltaic Engineering Research Center (SPERC)en
dc.identifier.journalMicroelectronic Engineeringen
dc.contributor.institutionLaboratoire des Technologies de la Microélectronique, CNRS, UMR 5129, 17 avenue des martyrs, 38054 Grenoble, Franceen
kaust.authorGereige, Issamen
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