A novel differential frequency micro-gyroscope

Handle URI:
http://hdl.handle.net/10754/575577
Title:
A novel differential frequency micro-gyroscope
Authors:
Nayfeh, A. H.; Abdel-Rahman, E. M.; Ghommem, M.
Abstract:
We present a frequency-domain method to measure angular speeds using electrostatic micro-electro-mechanical system actuators. Towards this end, we study a single-axis gyroscope made of a micro-cantilever and a proof-mass coupled to two fixed electrodes. The gyroscope possesses two orthogonal axes of symmetry and identical flexural mode shapes along these axes. We develop the equations of motion describing the coupled bending modes in the presence of electrostatic and Coriolis forces. Furthermore, we derive a consistent closed-form higher-order expression for the natural frequencies of the coupled flexural modes. The closed-form expression is verified by comparing its results to those obtained from numerical integration of the equations of motion. We find that rotations around the beam axis couple each pair of identical bending modes to produce a pair of global modes. They also split their common natural frequency into a pair of closely spaced natural frequencies. We propose the use of the difference between this pair of frequencies, which is linearly proportional to the speed of rotation around the beam axis, as a detector for the angular speed.
KAUST Department:
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Publisher:
SAGE Publications
Journal:
Journal of Vibration and Control
Issue Date:
10-Jul-2013
DOI:
10.1177/1077546313491775
Type:
Article
ISSN:
1077-5463; 1741-2986
Appears in Collections:
Articles; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorNayfeh, A. H.en
dc.contributor.authorAbdel-Rahman, E. M.en
dc.contributor.authorGhommem, M.en
dc.date.accessioned2015-08-24T08:33:19Zen
dc.date.available2015-08-24T08:33:19Zen
dc.date.issued2013-07-10en
dc.identifier.issn1077-5463en
dc.identifier.issn1741-2986en
dc.identifier.doi10.1177/1077546313491775en
dc.identifier.urihttp://hdl.handle.net/10754/575577en
dc.description.abstractWe present a frequency-domain method to measure angular speeds using electrostatic micro-electro-mechanical system actuators. Towards this end, we study a single-axis gyroscope made of a micro-cantilever and a proof-mass coupled to two fixed electrodes. The gyroscope possesses two orthogonal axes of symmetry and identical flexural mode shapes along these axes. We develop the equations of motion describing the coupled bending modes in the presence of electrostatic and Coriolis forces. Furthermore, we derive a consistent closed-form higher-order expression for the natural frequencies of the coupled flexural modes. The closed-form expression is verified by comparing its results to those obtained from numerical integration of the equations of motion. We find that rotations around the beam axis couple each pair of identical bending modes to produce a pair of global modes. They also split their common natural frequency into a pair of closely spaced natural frequencies. We propose the use of the difference between this pair of frequencies, which is linearly proportional to the speed of rotation around the beam axis, as a detector for the angular speed.en
dc.publisherSAGE Publicationsen
dc.titleA novel differential frequency micro-gyroscopeen
dc.typeArticleen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.identifier.journalJournal of Vibration and Controlen
dc.contributor.institutionVirginia Polytech Inst & State Univ, Dept Engn Sci & Mech, Blacksburg, VA 24061 USAen
dc.contributor.institutionUniv Waterloo, Dept Syst Design Engn, Waterloo, ON N2L 3G1, Canadaen
kaust.authorGhommem, Mehdien
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