Low pull-in voltage electrostatic MEMS switch using liquid dielectric

Handle URI:
http://hdl.handle.net/10754/564970
Title:
Low pull-in voltage electrostatic MEMS switch using liquid dielectric
Authors:
Zidan, Mohammed A. ( 0000-0003-3843-814X ) ; Kosel, Jürgen ( 0000-0002-8998-8275 ) ; Salama, Khaled N. ( 0000-0001-7742-1282 )
Abstract:
In this paper, we present an electrostatic MEMS switch with liquids as dielectric to reduce the actuation voltage. The concept is verified by simulating a lateral dual gate switch, where the required pull-in voltage is reduced by more than 8 times after using water as a dielectric, to become as low as 5.36V. The proposed switch is simulated using COMSOL multiphysics using various liquid volumes to study their effect on the switching performance. Finally, we propose the usage of the lateral switch as a single switch XOR logic gate.
KAUST Department:
Electrical Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division; Sensing, Magnetism and Microsystems Lab; Sensors Lab
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
2014 IEEE 57th International Midwest Symposium on Circuits and Systems (MWSCAS)
Conference/Event name:
2014 IEEE 57th International Midwest Symposium on Circuits and Systems, MWSCAS 2014
Issue Date:
Aug-2014
DOI:
10.1109/MWSCAS.2014.6908379
Type:
Conference Paper
ISSN:
15483746
ISBN:
9781479941346; 9781479941346
Appears in Collections:
Conference Papers; Electrical Engineering Program; Sensing, Magnetism and Microsystems Lab; Sensors Lab; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorZidan, Mohammed A.en
dc.contributor.authorKosel, Jürgenen
dc.contributor.authorSalama, Khaled N.en
dc.date.accessioned2015-08-04T07:26:39Zen
dc.date.available2015-08-04T07:26:39Zen
dc.date.issued2014-08en
dc.identifier.isbn9781479941346; 9781479941346en
dc.identifier.issn15483746en
dc.identifier.doi10.1109/MWSCAS.2014.6908379en
dc.identifier.urihttp://hdl.handle.net/10754/564970en
dc.description.abstractIn this paper, we present an electrostatic MEMS switch with liquids as dielectric to reduce the actuation voltage. The concept is verified by simulating a lateral dual gate switch, where the required pull-in voltage is reduced by more than 8 times after using water as a dielectric, to become as low as 5.36V. The proposed switch is simulated using COMSOL multiphysics using various liquid volumes to study their effect on the switching performance. Finally, we propose the usage of the lateral switch as a single switch XOR logic gate.en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.titleLow pull-in voltage electrostatic MEMS switch using liquid dielectricen
dc.typeConference Paperen
dc.contributor.departmentElectrical Engineering Programen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.contributor.departmentSensing, Magnetism and Microsystems Laben
dc.contributor.departmentSensors Laben
dc.identifier.journal2014 IEEE 57th International Midwest Symposium on Circuits and Systems (MWSCAS)en
dc.conference.date3 August 2014 through 6 August 2014en
dc.conference.name2014 IEEE 57th International Midwest Symposium on Circuits and Systems, MWSCAS 2014en
kaust.authorZidan, Mohammed A.en
kaust.authorKosel, Jürgenen
kaust.authorSalama, Khaled N.en
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