Nonlinear dynamics of an electrically actuated mems device: Experimental and theoretical investigation

Handle URI:
http://hdl.handle.net/10754/564818
Title:
Nonlinear dynamics of an electrically actuated mems device: Experimental and theoretical investigation
Authors:
Ruzziconi, Laura; Ramini, Abdallah H.; Younis, Mohammad I. ( 0000-0002-9491-1838 ) ; Lenci, Stefano
Abstract:
This study deals with an experimental and theoretical investigation of an electrically actuated micro-electromechanical system (MEMS). The experimental nonlinear dynamics are explored via frequency sweeps in a neighborhood of the first symmetric natural frequency, at increasing values of electrodynamic excitation. Both the non-resonant branch, the resonant one, the jump between them, and the presence of a range of inevitable escape (dynamic pull-in) are observed. To simulate the experimental behavior, a single degree-offreedom spring mass model is derived, which is based on the information coming from the experimentation. Despite the apparent simplicity, the model is able to catch all the most relevant aspects of the device response. This occurs not only at low values of electrodynamic excitation, but also at higher ones. Nevertheless, the theoretical predictions are not completely fulfilled in some aspects. In particular, the range of existence of each attractor is smaller in practice than in the simulations. This is because, under realistic conditions, disturbances are inevitably encountered (e.g. discontinuous steps when performing the sweeping, approximations in the modeling, etc.) and give uncertainties to the operating initial conditions. A reliable prediction of the actual (and not only theoretical) response is essential in applications. To take disturbances into account, we develop a dynamical integrity analysis. Integrity profiles and integrity charts are performed. They are able to detect the parameter range where each branch can be reliably observed in practice and where, instead, becomes vulnerable. Moreover, depending on the magnitude of the expected disturbances, the integrity charts can serve as a design guideline, in order to effectively operate the device in safe condition, according to the desired outcome. Copyright © 2013 by ASME.
KAUST Department:
Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program
Publisher:
ASME International
Journal:
Volume 4A: Dynamics, Vibration and Control
Conference/Event name:
ASME 2013 International Mechanical Engineering Congress and Exposition, IMECE 2013
Issue Date:
15-Nov-2013
DOI:
10.1115/IMECE2013-63627
Type:
Conference Paper
ISBN:
9780791856246
Appears in Collections:
Conference Papers; Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program

Full metadata record

DC FieldValue Language
dc.contributor.authorRuzziconi, Lauraen
dc.contributor.authorRamini, Abdallah H.en
dc.contributor.authorYounis, Mohammad I.en
dc.contributor.authorLenci, Stefanoen
dc.date.accessioned2015-08-04T07:17:06Zen
dc.date.available2015-08-04T07:17:06Zen
dc.date.issued2013-11-15en
dc.identifier.isbn9780791856246en
dc.identifier.doi10.1115/IMECE2013-63627en
dc.identifier.urihttp://hdl.handle.net/10754/564818en
dc.description.abstractThis study deals with an experimental and theoretical investigation of an electrically actuated micro-electromechanical system (MEMS). The experimental nonlinear dynamics are explored via frequency sweeps in a neighborhood of the first symmetric natural frequency, at increasing values of electrodynamic excitation. Both the non-resonant branch, the resonant one, the jump between them, and the presence of a range of inevitable escape (dynamic pull-in) are observed. To simulate the experimental behavior, a single degree-offreedom spring mass model is derived, which is based on the information coming from the experimentation. Despite the apparent simplicity, the model is able to catch all the most relevant aspects of the device response. This occurs not only at low values of electrodynamic excitation, but also at higher ones. Nevertheless, the theoretical predictions are not completely fulfilled in some aspects. In particular, the range of existence of each attractor is smaller in practice than in the simulations. This is because, under realistic conditions, disturbances are inevitably encountered (e.g. discontinuous steps when performing the sweeping, approximations in the modeling, etc.) and give uncertainties to the operating initial conditions. A reliable prediction of the actual (and not only theoretical) response is essential in applications. To take disturbances into account, we develop a dynamical integrity analysis. Integrity profiles and integrity charts are performed. They are able to detect the parameter range where each branch can be reliably observed in practice and where, instead, becomes vulnerable. Moreover, depending on the magnitude of the expected disturbances, the integrity charts can serve as a design guideline, in order to effectively operate the device in safe condition, according to the desired outcome. Copyright © 2013 by ASME.en
dc.publisherASME Internationalen
dc.titleNonlinear dynamics of an electrically actuated mems device: Experimental and theoretical investigationen
dc.typeConference Paperen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.contributor.departmentMechanical Engineering Programen
dc.identifier.journalVolume 4A: Dynamics, Vibration and Controlen
dc.conference.date15 November 2013 through 21 November 2013en
dc.conference.nameASME 2013 International Mechanical Engineering Congress and Exposition, IMECE 2013en
dc.conference.locationSan Diego, CAen
dc.contributor.institutionDepartment of Civil and Building Engineering, Architecture Polytechnic University of Marche, via Brecce Bianche, 60131 Ancona, Italyen
dc.contributor.institutionDepartment of Mechanical Engineering, State University of New York at Binghamton, Binghamton, 13902 NY, United Statesen
kaust.authorYounis, Mohammad I.en
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