Nonlinear dynamic response of an electrically actuated imperfect microbeam resonator

Handle URI:
http://hdl.handle.net/10754/564787
Title:
Nonlinear dynamic response of an electrically actuated imperfect microbeam resonator
Authors:
Ruzziconi, Laura; Bataineh, Ahmad M.; Younis, Mohammad I. ( 0000-0002-9491-1838 ) ; Cui, Weili; Lenci, Stefano
Abstract:
We present a study of the dynamic behavior of a MEMS device constituted of an imperfect clamped-clamped microbeam subjected to electrostatic and electrodynamic actuation. Our objective is to develop a theoretical analysis, which is able to describe and predict all the main relevant aspects of the experimental response. Extensive experimental investigation is conducted, where the main imperfections coming from microfabrication are detected and the nonlinear dynamics are explored at increasing values of electrodynamic excitation, in a neighborhood of the first symmetric resonance. The nonlinear behavior is highlighted, which includes ranges of multistability, where the non-resonant and the resonant branch coexist, and intervals where superharmonic resonances are clearly visible. Numerical simulations are performed. Initially, two single mode reduced-order models are considered. One is generated via the Galerkin technique, and the other one via the combined use of the Ritz method and the Padé approximation. Both of them are able to provide a satisfactory agreement with the experimental data. This occurs not only at low values of electrodynamic excitation, but also at higher ones. Their computational efficiency is discussed in detail, since this is an essential aspect for systematic local and global simulations. Finally, the theoretical analysis is further improved and a two-degree-of-freedom reduced-order model is developed, which is capable also to capture the measured second symmetric superharmonic resonance. Despite the apparent simplicity, it is shown that all the proposed reduced-order models are able to describe the experimental complex nonlinear dynamics of the device accurately and properly, which validates the proposed theoretical approach. Copyright © 2013 by ASME.
KAUST Department:
Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program
Publisher:
ASME International
Journal:
Volume 1: 15th International Conference on Advanced Vehicle Technologies; 10th International Conference on Design Education; 7th International Conference on Micro- and Nanosystems
Conference/Event name:
ASME 2013 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2013
Issue Date:
4-Aug-2013
DOI:
10.1115/DETC2013-12240
Type:
Conference Paper
ISBN:
9780791855843
Appears in Collections:
Conference Papers; Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program

Full metadata record

DC FieldValue Language
dc.contributor.authorRuzziconi, Lauraen
dc.contributor.authorBataineh, Ahmad M.en
dc.contributor.authorYounis, Mohammad I.en
dc.contributor.authorCui, Weilien
dc.contributor.authorLenci, Stefanoen
dc.date.accessioned2015-08-04T07:15:56Zen
dc.date.available2015-08-04T07:15:56Zen
dc.date.issued2013-08-04en
dc.identifier.isbn9780791855843en
dc.identifier.doi10.1115/DETC2013-12240en
dc.identifier.urihttp://hdl.handle.net/10754/564787en
dc.description.abstractWe present a study of the dynamic behavior of a MEMS device constituted of an imperfect clamped-clamped microbeam subjected to electrostatic and electrodynamic actuation. Our objective is to develop a theoretical analysis, which is able to describe and predict all the main relevant aspects of the experimental response. Extensive experimental investigation is conducted, where the main imperfections coming from microfabrication are detected and the nonlinear dynamics are explored at increasing values of electrodynamic excitation, in a neighborhood of the first symmetric resonance. The nonlinear behavior is highlighted, which includes ranges of multistability, where the non-resonant and the resonant branch coexist, and intervals where superharmonic resonances are clearly visible. Numerical simulations are performed. Initially, two single mode reduced-order models are considered. One is generated via the Galerkin technique, and the other one via the combined use of the Ritz method and the Padé approximation. Both of them are able to provide a satisfactory agreement with the experimental data. This occurs not only at low values of electrodynamic excitation, but also at higher ones. Their computational efficiency is discussed in detail, since this is an essential aspect for systematic local and global simulations. Finally, the theoretical analysis is further improved and a two-degree-of-freedom reduced-order model is developed, which is capable also to capture the measured second symmetric superharmonic resonance. Despite the apparent simplicity, it is shown that all the proposed reduced-order models are able to describe the experimental complex nonlinear dynamics of the device accurately and properly, which validates the proposed theoretical approach. Copyright © 2013 by ASME.en
dc.publisherASME Internationalen
dc.subjectClamped-clamped microbeamen
dc.subjectElectric actuationen
dc.subjectNonlinear behavioren
dc.subjectReduced-order modelsen
dc.titleNonlinear dynamic response of an electrically actuated imperfect microbeam resonatoren
dc.typeConference Paperen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.contributor.departmentMechanical Engineering Programen
dc.identifier.journalVolume 1: 15th International Conference on Advanced Vehicle Technologies; 10th International Conference on Design Education; 7th International Conference on Micro- and Nanosystemsen
dc.conference.date4 August 2013 through 7 August 2013en
dc.conference.nameASME 2013 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2013en
dc.conference.locationPortland, ORen
dc.contributor.institutionDepartment of Civil and Building Engineering, and Architecture, Polytechnic University of Marche, via Brecce Bianche, 60131 Ancona, Italyen
dc.contributor.institutionDepartment of Mechanical Engineering, State University of New York at Binghamton, Binghamton, NY 13902, United Statesen
kaust.authorYounis, Mohammad I.en
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