Silicon fabric for multi-functional applications

Handle URI:
http://hdl.handle.net/10754/564752
Title:
Silicon fabric for multi-functional applications
Authors:
Sevilla, Galo T. ( 0000-0002-9419-4437 ) ; Rojas, Jhonathan Prieto ( 0000-0001-7848-1121 ) ; Ahmed, Sally; Hussain, Aftab M. ( 0000-0002-9516-9428 ) ; Inayat, Salman Bin; Hussain, Muhammad Mustafa ( 0000-0003-3279-0441 )
Abstract:
This paper reports a generic process flow to fabricate mechanically flexible and optically semi-transparent thermoelectric generators (TEGs), micro lithium-ion batteries (μLIB) and metal-oxide-semiconductor capacitors (MOSCAPs) on mono-crystalline silicon fabric platforms from standard bulk silicon (100) wafers. All the fabricated devices show outstanding mechanical flexibility and performance, making an important step towards monolithic integration of Energy Chip (self-powered devices) including energy harvesters and electronic devices on flexible platforms. We also report a recyclability process for the remaining bulk substrate after release, allowing us to achieve a low cost flexible platform for high performance applications. © 2013 IEEE.
KAUST Department:
Integrated Nanotechnology Lab; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division; Electrical Engineering Program
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
Conference/Event name:
2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Issue Date:
Jun-2013
DOI:
10.1109/Transducers.2013.6627347
Type:
Conference Paper
ISBN:
9781467359818
Appears in Collections:
Conference Papers; Electrical Engineering Program; Integrated Nanotechnology Lab; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorSevilla, Galo T.en
dc.contributor.authorRojas, Jhonathan Prietoen
dc.contributor.authorAhmed, Sallyen
dc.contributor.authorHussain, Aftab M.en
dc.contributor.authorInayat, Salman Binen
dc.contributor.authorHussain, Muhammad Mustafaen
dc.date.accessioned2015-08-04T07:14:44Zen
dc.date.available2015-08-04T07:14:44Zen
dc.date.issued2013-06en
dc.identifier.isbn9781467359818en
dc.identifier.doi10.1109/Transducers.2013.6627347en
dc.identifier.urihttp://hdl.handle.net/10754/564752en
dc.description.abstractThis paper reports a generic process flow to fabricate mechanically flexible and optically semi-transparent thermoelectric generators (TEGs), micro lithium-ion batteries (μLIB) and metal-oxide-semiconductor capacitors (MOSCAPs) on mono-crystalline silicon fabric platforms from standard bulk silicon (100) wafers. All the fabricated devices show outstanding mechanical flexibility and performance, making an important step towards monolithic integration of Energy Chip (self-powered devices) including energy harvesters and electronic devices on flexible platforms. We also report a recyclability process for the remaining bulk substrate after release, allowing us to achieve a low cost flexible platform for high performance applications. © 2013 IEEE.en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.subjectflexible electronicsen
dc.subjecthigh performance flexible devicesen
dc.subjectlithium-ion batteryen
dc.subjectMetal-Oxide-Semiconductoren
dc.subjectmicro-thermoelectric generatorsen
dc.titleSilicon fabric for multi-functional applicationsen
dc.typeConference Paperen
dc.contributor.departmentIntegrated Nanotechnology Laben
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.contributor.departmentElectrical Engineering Programen
dc.identifier.journal2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)en
dc.conference.date16 June 2013 through 20 June 2013en
dc.conference.name2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013en
dc.conference.locationBarcelonaen
kaust.authorSevilla, Galo T.en
kaust.authorRojas, Jhonathan Prietoen
kaust.authorAhmed, Sallyen
kaust.authorHussain, Aftab M.en
kaust.authorInayat, Salman Binen
kaust.authorHussain, Muhammad Mustafaen
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