Simulation of SU-8 frequency-driven scratch drive actuators

Handle URI:
http://hdl.handle.net/10754/564693
Title:
Simulation of SU-8 frequency-driven scratch drive actuators
Authors:
Conchouso Gonzalez, David ( 0000-0002-9788-0977 ) ; Carreno, Armando Arpys Arevalo ( 0000-0001-9446-3310 ) ; Castro, David; Al Rawashdeh, Ehab Jamal; Valencia Garcia, Manuel; Zaher, Amir Omar; Kosel, Jürgen ( 0000-0002-8998-8275 ) ; Foulds, Ian G.
Abstract:
This paper presents the simulation of Scratch Drive Actuators (SDAs) for micro-robotic applications. SDAs use electrostatic forces to generate motion on top of an interdigitated electrode array. The purpose of this investigation is to evaluate several design geometries and micro-actuator configurations using ConventorWare®'s finite element analysis module. The study performed investigates the SDAs modal and electrostatic behavior and the effects of linking two or more SDAs together in a microrobot device. In addition, the interdigitated electrode array performance, used for power delivery, was studied by changing the thickness of its dielectric layer. We present our observations based on these studies, which will aid in the understanding and development of future SDA designs. © 2013 IEEE.
KAUST Department:
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division; Electrical Engineering Program; Sensing, Magnetism and Microsystems Lab
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
2013 UKSim 15th International Conference on Computer Modelling and Simulation
Conference/Event name:
UKSim 15th International Conference on Computer Modelling and Simulation, UKSim 2013
Issue Date:
Apr-2013
DOI:
10.1109/UKSim.2013.55
Type:
Conference Paper
ISBN:
9780769549941
Appears in Collections:
Conference Papers; Electrical Engineering Program; Sensing, Magnetism and Microsystems Lab; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorConchouso Gonzalez, Daviden
dc.contributor.authorCarreno, Armando Arpys Arevaloen
dc.contributor.authorCastro, Daviden
dc.contributor.authorAl Rawashdeh, Ehab Jamalen
dc.contributor.authorValencia Garcia, Manuelen
dc.contributor.authorZaher, Amir Omaren
dc.contributor.authorKosel, Jürgenen
dc.contributor.authorFoulds, Ian G.en
dc.date.accessioned2015-08-04T07:12:43Zen
dc.date.available2015-08-04T07:12:43Zen
dc.date.issued2013-04en
dc.identifier.isbn9780769549941en
dc.identifier.doi10.1109/UKSim.2013.55en
dc.identifier.urihttp://hdl.handle.net/10754/564693en
dc.description.abstractThis paper presents the simulation of Scratch Drive Actuators (SDAs) for micro-robotic applications. SDAs use electrostatic forces to generate motion on top of an interdigitated electrode array. The purpose of this investigation is to evaluate several design geometries and micro-actuator configurations using ConventorWare®'s finite element analysis module. The study performed investigates the SDAs modal and electrostatic behavior and the effects of linking two or more SDAs together in a microrobot device. In addition, the interdigitated electrode array performance, used for power delivery, was studied by changing the thickness of its dielectric layer. We present our observations based on these studies, which will aid in the understanding and development of future SDA designs. © 2013 IEEE.en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.subjectConventorwareen
dc.subjectMemsen
dc.subjectMicrofabricationen
dc.subjectScratch drive actuatorsen
dc.subjectSu-8en
dc.titleSimulation of SU-8 frequency-driven scratch drive actuatorsen
dc.typeConference Paperen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.contributor.departmentElectrical Engineering Programen
dc.contributor.departmentSensing, Magnetism and Microsystems Laben
dc.identifier.journal2013 UKSim 15th International Conference on Computer Modelling and Simulationen
dc.conference.date10 April 2013 through 12 April 2013en
dc.conference.nameUKSim 15th International Conference on Computer Modelling and Simulation, UKSim 2013en
dc.conference.locationCambridgeen
kaust.authorKosel, Jürgenen
kaust.authorFoulds, Ian G.en
kaust.authorConchouso Gonzalez, Daviden
kaust.authorCarreno, Armando Arpys Arevaloen
kaust.authorCastro, Daviden
kaust.authorAl Rawashdeh, Ehab Jamalen
kaust.authorValencia Garcia, Manuelen
kaust.authorZaher, Amir Omaren
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