Simulation of a low frequency Z-axis SU-8 accelerometer in coventorware and MEMS+

Handle URI:
http://hdl.handle.net/10754/564692
Title:
Simulation of a low frequency Z-axis SU-8 accelerometer in coventorware and MEMS+
Authors:
Carreno, Armando Arpys Arevalo ( 0000-0001-9446-3310 ) ; Conchouso Gonzalez, David ( 0000-0002-9788-0977 ) ; Zaher, Amir Omar; Foulds, Ian G.; Kosel, Jürgen ( 0000-0002-8998-8275 )
Abstract:
This paper presents the simulation of a z-axis SU-8 capacitive accelerometer. The study consists of a modal analysis of the modeled accelerometer, a study relating capacitance to acceleration, capacitance to deflection, an effective spring constant calculation, and a comparison of results achieved using CoventorWare® ANALYZER™ and MEMS+®. A fabricated energy harvester design from [1] was used for modeling and simulation in this study, with a four spring attachment of a 650μm×650μm; ×110μm proof mass of 4.542×10-8 kg. At rest, the spacing between electrodes is 4μm along the z-axis, and at 1.5g acceleration, there is 1.9μm spacing between electrodes, at which point pull in occurs for a 1V voltage. © 2013 IEEE.
KAUST Department:
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division; Electrical Engineering Program; Sensing, Magnetism and Microsystems Lab
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
2013 UKSim 15th International Conference on Computer Modelling and Simulation
Conference/Event name:
UKSim 15th International Conference on Computer Modelling and Simulation, UKSim 2013
Issue Date:
Apr-2013
DOI:
10.1109/UKSim.2013.41
Type:
Conference Paper
ISBN:
9780769549941
Appears in Collections:
Conference Papers; Electrical Engineering Program; Sensing, Magnetism and Microsystems Lab; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorCarreno, Armando Arpys Arevaloen
dc.contributor.authorConchouso Gonzalez, Daviden
dc.contributor.authorZaher, Amir Omaren
dc.contributor.authorFoulds, Ian G.en
dc.contributor.authorKosel, Jürgenen
dc.date.accessioned2015-08-04T07:12:40Zen
dc.date.available2015-08-04T07:12:40Zen
dc.date.issued2013-04en
dc.identifier.isbn9780769549941en
dc.identifier.doi10.1109/UKSim.2013.41en
dc.identifier.urihttp://hdl.handle.net/10754/564692en
dc.description.abstractThis paper presents the simulation of a z-axis SU-8 capacitive accelerometer. The study consists of a modal analysis of the modeled accelerometer, a study relating capacitance to acceleration, capacitance to deflection, an effective spring constant calculation, and a comparison of results achieved using CoventorWare® ANALYZER™ and MEMS+®. A fabricated energy harvester design from [1] was used for modeling and simulation in this study, with a four spring attachment of a 650μm×650μm; ×110μm proof mass of 4.542×10-8 kg. At rest, the spacing between electrodes is 4μm along the z-axis, and at 1.5g acceleration, there is 1.9μm spacing between electrodes, at which point pull in occurs for a 1V voltage. © 2013 IEEE.en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.subjectCoventorware®en
dc.subjectLow frequency accelerometeren
dc.subjectMEMS accelerometersen
dc.subjectMEMS+®en
dc.subjectSU-8 photoresisten
dc.titleSimulation of a low frequency Z-axis SU-8 accelerometer in coventorware and MEMS+en
dc.typeConference Paperen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.contributor.departmentElectrical Engineering Programen
dc.contributor.departmentSensing, Magnetism and Microsystems Laben
dc.identifier.journal2013 UKSim 15th International Conference on Computer Modelling and Simulationen
dc.conference.date10 April 2013 through 12 April 2013en
dc.conference.nameUKSim 15th International Conference on Computer Modelling and Simulation, UKSim 2013en
dc.conference.locationCambridgeen
kaust.authorFoulds, Ian G.en
kaust.authorKosel, Jürgenen
kaust.authorCarreno, Armando Arpys Arevaloen
kaust.authorConchouso Gonzalez, Daviden
kaust.authorZaher, Amir Omaren
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