A surface acoustic wave passive and wireless sensor for magnetic fields, temperature, and humidity

Handle URI:
http://hdl.handle.net/10754/563982
Title:
A surface acoustic wave passive and wireless sensor for magnetic fields, temperature, and humidity
Authors:
Li, Bodong ( 0000-0002-4024-4400 ) ; Yassine, Omar ( 0000-0002-0117-8017 ) ; Kosel, Jürgen ( 0000-0002-8998-8275 )
Abstract:
In this paper, we report an integrated single-chip surface acoustic wave sensor with the capability of measuring magnetic field, temperature, and humidity. The sensor is fabricated using a thermally sensitive LiNbO3 substrate, a humidity sensitive hydrogel coating, and a magnetic field sensitive impedance load. The sensor response to individually and simultaneously changing magnetic field, temperature and humidity is characterized by connecting a network analyzer directly to the sensor. Analytical models for each measurand are derived and used to compensate noise due to cross sensitivities. The results show that all three measurands can be monitored in parallel with sensitivities of 75 ppm/°C, 0.13 dB/%R.H. (at 50%R.H.), 0.18 dB/Oe and resolutions of 0.1 °C, 0.4%R.H., 1 Oe for temperature, humidity and magnetic field, respectively. A passive wireless measurement is also conducted on a current line using, which shows the sensors capability to measure both temperature and current signals simultaneously.
KAUST Department:
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division; Electrical Engineering Program; Physical Sciences and Engineering (PSE) Division; Sensing, Magnetism and Microsystems Lab
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
IEEE Sensors Journal
Issue Date:
Jan-2015
DOI:
10.1109/JSEN.2014.2335058
Type:
Article
ISSN:
1530437X
Sponsors:
This work was supported by the King Abdullah University of Science and Technology, Thuwal, Saudi Arabia.
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division; Electrical Engineering Program; Sensing, Magnetism and Microsystems Lab; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorLi, Bodongen
dc.contributor.authorYassine, Omaren
dc.contributor.authorKosel, Jürgenen
dc.date.accessioned2015-08-03T12:21:47Zen
dc.date.available2015-08-03T12:21:47Zen
dc.date.issued2015-01en
dc.identifier.issn1530437Xen
dc.identifier.doi10.1109/JSEN.2014.2335058en
dc.identifier.urihttp://hdl.handle.net/10754/563982en
dc.description.abstractIn this paper, we report an integrated single-chip surface acoustic wave sensor with the capability of measuring magnetic field, temperature, and humidity. The sensor is fabricated using a thermally sensitive LiNbO3 substrate, a humidity sensitive hydrogel coating, and a magnetic field sensitive impedance load. The sensor response to individually and simultaneously changing magnetic field, temperature and humidity is characterized by connecting a network analyzer directly to the sensor. Analytical models for each measurand are derived and used to compensate noise due to cross sensitivities. The results show that all three measurands can be monitored in parallel with sensitivities of 75 ppm/°C, 0.13 dB/%R.H. (at 50%R.H.), 0.18 dB/Oe and resolutions of 0.1 °C, 0.4%R.H., 1 Oe for temperature, humidity and magnetic field, respectively. A passive wireless measurement is also conducted on a current line using, which shows the sensors capability to measure both temperature and current signals simultaneously.en
dc.description.sponsorshipThis work was supported by the King Abdullah University of Science and Technology, Thuwal, Saudi Arabia.en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.titleA surface acoustic wave passive and wireless sensor for magnetic fields, temperature, and humidityen
dc.typeArticleen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.contributor.departmentElectrical Engineering Programen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.contributor.departmentSensing, Magnetism and Microsystems Laben
dc.identifier.journalIEEE Sensors Journalen
kaust.authorLi, Bodongen
kaust.authorYassine, Omaren
kaust.authorKosel, Jürgenen
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