Three-axis magnetic field induction sensor realized on buckled cantilever plate

Handle URI:
http://hdl.handle.net/10754/562853
Title:
Three-axis magnetic field induction sensor realized on buckled cantilever plate
Authors:
Alfadhel, Ahmed ( 0000-0003-3244-0644 ) ; Carreno, Armando Arpys Arevalo ( 0000-0001-9446-3310 ) ; Foulds, Ian G.; Kosel, Jürgen ( 0000-0002-8998-8275 )
Abstract:
This work presents the fabrication and characterization of a three-axis induction sensor consisting of one planar microcoil, fixed on the substrate, and two microcoils fabricated on Bbuckled cantilever plates (BCP) oriented perpendicularly to the substrate and each other. The BCP allows an out-of-plane translation while preserving a direct connection to the substrate, which aids the routing of electrical lines. The fabricated sensor is integrated on a single substrate, allowing interaction and integration with other systems. The devices are fabricated using a MEMS polymer fabrication process. Different microcoil configurations are realized with 17-30 turns, 5 μm track width, and 15-20 μm track pitch. The sensor showed up to 6.8 nT/√Hz resolution to magnetic fields within a frequency range of 40 Hz to 1 MHz. The BCP concept provides a strikingly simple method to fabricate a three-axis field sensor that can readily be integrated with electronic circuits, and the sensor's performance can easily be adjusted within a wide range by changing the dimensions of the coils. © 2013 IEEE.
KAUST Department:
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division; Electrical Engineering Program; Sensing, Magnetism and Microsystems Lab
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
IEEE Transactions on Magnetics
Issue Date:
Jul-2013
DOI:
10.1109/TMAG.2012.2237019
Type:
Article
ISSN:
00189464
Appears in Collections:
Articles; Electrical Engineering Program; Sensing, Magnetism and Microsystems Lab; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorAlfadhel, Ahmeden
dc.contributor.authorCarreno, Armando Arpys Arevaloen
dc.contributor.authorFoulds, Ian G.en
dc.contributor.authorKosel, Jürgenen
dc.date.accessioned2015-08-03T11:12:50Zen
dc.date.available2015-08-03T11:12:50Zen
dc.date.issued2013-07en
dc.identifier.issn00189464en
dc.identifier.doi10.1109/TMAG.2012.2237019en
dc.identifier.urihttp://hdl.handle.net/10754/562853en
dc.description.abstractThis work presents the fabrication and characterization of a three-axis induction sensor consisting of one planar microcoil, fixed on the substrate, and two microcoils fabricated on Bbuckled cantilever plates (BCP) oriented perpendicularly to the substrate and each other. The BCP allows an out-of-plane translation while preserving a direct connection to the substrate, which aids the routing of electrical lines. The fabricated sensor is integrated on a single substrate, allowing interaction and integration with other systems. The devices are fabricated using a MEMS polymer fabrication process. Different microcoil configurations are realized with 17-30 turns, 5 μm track width, and 15-20 μm track pitch. The sensor showed up to 6.8 nT/√Hz resolution to magnetic fields within a frequency range of 40 Hz to 1 MHz. The BCP concept provides a strikingly simple method to fabricate a three-axis field sensor that can readily be integrated with electronic circuits, and the sensor's performance can easily be adjusted within a wide range by changing the dimensions of the coils. © 2013 IEEE.en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.subjectMagnetic sensoren
dc.subjectMEMSen
dc.subjectmicro fabricationen
dc.subjectmicrocoilen
dc.titleThree-axis magnetic field induction sensor realized on buckled cantilever plateen
dc.typeArticleen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.contributor.departmentElectrical Engineering Programen
dc.contributor.departmentSensing, Magnetism and Microsystems Laben
dc.identifier.journalIEEE Transactions on Magneticsen
kaust.authorAlfadhel, Ahmeden
kaust.authorFoulds, Ian G.en
kaust.authorKosel, Jürgenen
kaust.authorCarreno, Armando Arpys Arevaloen
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