An electrically actuated imperfect microbeam: Dynamical integrity for interpreting and predicting the device response

Handle URI:
http://hdl.handle.net/10754/562658
Title:
An electrically actuated imperfect microbeam: Dynamical integrity for interpreting and predicting the device response
Authors:
Ruzziconi, Laura; Younis, Mohammad I. ( 0000-0002-9491-1838 ) ; Lenci, Stefano
Abstract:
In this study we deal with a microelectromechanical system (MEMS) and develop a dynamical integrity analysis to interpret and predict the experimental response. The device consists of a clamped-clamped polysilicon microbeam, which is electrostatically and electrodynamically actuated. It has non-negligible imperfections, which are a typical consequence of the microfabrication process. A single-mode reduced-order model is derived and extensive numerical simulations are performed in a neighborhood of the first symmetric natural frequency, via frequency response diagrams and behavior chart. The typical softening behavior is observed and the overall scenario is explored, when both the frequency and the electrodynamic voltage are varied. We show that simulations based on direct numerical integration of the equation of motion in time yield satisfactory agreement with the experimental data. Nevertheless, these theoretical predictions are not completely fulfilled in some aspects. In particular, the range of existence of each attractor is smaller in practice than in the simulations. This is because these theoretical curves represent the ideal limit case where disturbances are absent, which never occurs under realistic conditions. A reliable prediction of the actual (and not only theoretical) range of existence of each attractor is essential in applications. To overcome this discrepancy and extend the results to the practical case where disturbances exist, a dynamical integrity analysis is developed. After introducing dynamical integrity concepts, integrity profiles and integrity charts are drawn. They are able to describe if each attractor is robust enough to tolerate the disturbances. Moreover, they detect the parameter range where each branch can be reliably observed in practice and where, instead, becomes vulnerable, i.e. they provide valuable information to operate the device in safe conditions according to the desired outcome and depending on the expected disturbances. © 2013 Springer Science+Business Media Dordrecht.
KAUST Department:
Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program
Publisher:
Springer Verlag
Journal:
Meccanica
Issue Date:
20-Feb-2013
DOI:
10.1007/s11012-013-9707-x
Type:
Article
ISSN:
00256455
Sponsors:
The authors would like to thank Dr. Weili Cui for the fabrication of the MEMS device and Ahmad M. Bataineh for conducting the experimental data. This work has been supported in part by the National Science Foundation through grant # 0846775, and in part by the Italian Ministry of Education, Universities and Research (MIUR) by the PRIN funded program 2010/11 N. 2010MBJK5B.
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program

Full metadata record

DC FieldValue Language
dc.contributor.authorRuzziconi, Lauraen
dc.contributor.authorYounis, Mohammad I.en
dc.contributor.authorLenci, Stefanoen
dc.date.accessioned2015-08-03T11:00:07Zen
dc.date.available2015-08-03T11:00:07Zen
dc.date.issued2013-02-20en
dc.identifier.issn00256455en
dc.identifier.doi10.1007/s11012-013-9707-xen
dc.identifier.urihttp://hdl.handle.net/10754/562658en
dc.description.abstractIn this study we deal with a microelectromechanical system (MEMS) and develop a dynamical integrity analysis to interpret and predict the experimental response. The device consists of a clamped-clamped polysilicon microbeam, which is electrostatically and electrodynamically actuated. It has non-negligible imperfections, which are a typical consequence of the microfabrication process. A single-mode reduced-order model is derived and extensive numerical simulations are performed in a neighborhood of the first symmetric natural frequency, via frequency response diagrams and behavior chart. The typical softening behavior is observed and the overall scenario is explored, when both the frequency and the electrodynamic voltage are varied. We show that simulations based on direct numerical integration of the equation of motion in time yield satisfactory agreement with the experimental data. Nevertheless, these theoretical predictions are not completely fulfilled in some aspects. In particular, the range of existence of each attractor is smaller in practice than in the simulations. This is because these theoretical curves represent the ideal limit case where disturbances are absent, which never occurs under realistic conditions. A reliable prediction of the actual (and not only theoretical) range of existence of each attractor is essential in applications. To overcome this discrepancy and extend the results to the practical case where disturbances exist, a dynamical integrity analysis is developed. After introducing dynamical integrity concepts, integrity profiles and integrity charts are drawn. They are able to describe if each attractor is robust enough to tolerate the disturbances. Moreover, they detect the parameter range where each branch can be reliably observed in practice and where, instead, becomes vulnerable, i.e. they provide valuable information to operate the device in safe conditions according to the desired outcome and depending on the expected disturbances. © 2013 Springer Science+Business Media Dordrecht.en
dc.description.sponsorshipThe authors would like to thank Dr. Weili Cui for the fabrication of the MEMS device and Ahmad M. Bataineh for conducting the experimental data. This work has been supported in part by the National Science Foundation through grant # 0846775, and in part by the Italian Ministry of Education, Universities and Research (MIUR) by the PRIN funded program 2010/11 N. 2010MBJK5B.en
dc.publisherSpringer Verlagen
dc.subjectDynamical integrityen
dc.subjectMicroelectromechanical systemsen
dc.subjectMultistabilityen
dc.subjectNonlinear dynamicsen
dc.titleAn electrically actuated imperfect microbeam: Dynamical integrity for interpreting and predicting the device responseen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.contributor.departmentMechanical Engineering Programen
dc.identifier.journalMeccanicaen
dc.contributor.institutionDepartment of Civil, Building Engineering, and Architecture, Polytechnic University of Marche, via Brecce Bianche, 60131 Ancona, Italyen
dc.contributor.institutionDepartment of Mechanical Engineering, State University of New York at Binghamton, Binghamton, NY 13902, United Statesen
kaust.authorYounis, Mohammad I.en
All Items in KAUST are protected by copyright, with all rights reserved, unless otherwise indicated.