D33 mode piezoelectric diaphragm based acoustic transducer with high sensitivity

Handle URI:
http://hdl.handle.net/10754/562570
Title:
D33 mode piezoelectric diaphragm based acoustic transducer with high sensitivity
Authors:
Shen, Zhiyuan; Lu, Jingyu; Tan, Cheewee; Miao, Jianmin; Wang, Zhihong
Abstract:
This paper presents the design, fabrication, and characterization of an acoustic transducer using a piezoelectric freestanding bulk diaphragm as the sensing element. The diaphragm bearing the spiral electrode operates in d 33 mode, which allows the in-plane deformation of the diaphragm to be converted to the out-of-plane deformation and generates an acoustic wave in the same direction. A finite element code is developed to reorient the material polarization distribution according to the poling field calculated. The first four resonance modes have been simulated and verified by impedance and velocity spectra. The sensitivity and the sound pressure level of the transducer were characterized. The realized sensitivity of 126.21 μV/Pa at 1 kHz is nearly twenty times of the sensitivity of a sandwich d31 mode transducer. © 2012 Elsevier B.V.
KAUST Department:
Advanced Nanofabrication, Imaging and Characterization Core Lab; Core Labs
Publisher:
Elsevier
Journal:
Sensors and Actuators, A: Physical
Issue Date:
Jan-2013
DOI:
10.1016/j.sna.2012.09.028
Type:
Article
ISSN:
09244247
Appears in Collections:
Articles; Advanced Nanofabrication, Imaging and Characterization Core Lab

Full metadata record

DC FieldValue Language
dc.contributor.authorShen, Zhiyuanen
dc.contributor.authorLu, Jingyuen
dc.contributor.authorTan, Cheeweeen
dc.contributor.authorMiao, Jianminen
dc.contributor.authorWang, Zhihongen
dc.date.accessioned2015-08-03T10:43:11Zen
dc.date.available2015-08-03T10:43:11Zen
dc.date.issued2013-01en
dc.identifier.issn09244247en
dc.identifier.doi10.1016/j.sna.2012.09.028en
dc.identifier.urihttp://hdl.handle.net/10754/562570en
dc.description.abstractThis paper presents the design, fabrication, and characterization of an acoustic transducer using a piezoelectric freestanding bulk diaphragm as the sensing element. The diaphragm bearing the spiral electrode operates in d 33 mode, which allows the in-plane deformation of the diaphragm to be converted to the out-of-plane deformation and generates an acoustic wave in the same direction. A finite element code is developed to reorient the material polarization distribution according to the poling field calculated. The first four resonance modes have been simulated and verified by impedance and velocity spectra. The sensitivity and the sound pressure level of the transducer were characterized. The realized sensitivity of 126.21 μV/Pa at 1 kHz is nearly twenty times of the sensitivity of a sandwich d31 mode transducer. © 2012 Elsevier B.V.en
dc.publisherElsevieren
dc.subjectAcoustic transduceren
dc.subjectd33 mode transduceren
dc.subjectFinite element analysisen
dc.subjectPiezoelectric MEMSen
dc.titleD33 mode piezoelectric diaphragm based acoustic transducer with high sensitivityen
dc.typeArticleen
dc.contributor.departmentAdvanced Nanofabrication, Imaging and Characterization Core Laben
dc.contributor.departmentCore Labsen
dc.identifier.journalSensors and Actuators, A: Physicalen
dc.contributor.institutionSchool of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singaporeen
kaust.authorWang, Zhihongen
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