Capacitively coupled radio-frequency discharges in nitrogen at low pressures

Handle URI:
http://hdl.handle.net/10754/562241
Title:
Capacitively coupled radio-frequency discharges in nitrogen at low pressures
Authors:
Alves, Luís Lemos; Marques, Luís S A; Pintassilgo, Carlos D.; Wattieaux, Gaëtan; Es-sebbar, Et-touhami; Berndt, Johannes; Kovačević, Eva; Carrasco, Nathalie; Boufendi, Laïfa; Cernogora, Guy
Abstract:
This paper uses experiments and modelling to study capacitively coupled radio-frequency (rf) discharges in pure nitrogen, at 13.56MHz frequency, 0.11 mbar pressures and 230W coupled powers. Experiments performed on two similar (not twin) setups, existing in the LATMOS and the GREMI laboratories, include electrical and optical emission spectroscopy (OES) measurements. Electrical measurements give the rf-applied and the direct-current-self-bias voltages, the effective power coupled to the plasma and the average electron density. OES diagnostics measure the intensities of radiative transitions with the nitrogen second-positive and first-negative systems, and with the 811.5 nm atomic line of argon (present as an actinometer). Simulations use a hybrid code that couples a two-dimensional time-dependent fluid module, describing the dynamics of the charged particles (electrons and positive ions N 2 + and N 4 + ), and a zero-dimensional kinetic module, describing the production and destruction of nitrogen (atomic and molecular) neutral species. The coupling between these modules adopts the local mean energy approximation to define spacetime-dependent electron parameters for the fluid module and to work out spacetime-averaged rates for the kinetic module. The model gives general good predictions for the self-bias voltage and for the intensities of radiative transitions (both average and spatially resolved), underestimating the electron density by a factor of 34. © 2012 IOP Publishing Ltd.
KAUST Department:
Clean Combustion Research Center
Publisher:
IOP Publishing
Journal:
Plasma Sources Science and Technology
Issue Date:
6-Jul-2012
DOI:
10.1088/0963-0252/21/4/045008
Type:
Article
ISSN:
09630252
Sponsors:
This work is supported by a PICS Cooperation Program, financed by the Portuguese Foundation for Science and Technology (FCT) and by the Centre National de la Recherche Scientifique (CNRS). The calculations were performed on SeARCH (Services & Advanced Computing with HTC/HPC) funded by FEDER through the COMPETE program and by the Portuguese FCT under contract CONC-REEQ/443/EEI/2005. Et Es-sebbar thanks the ANR programme (ANR-09-JCJC-0038 contract) for his Post-Doctoral grant.
Appears in Collections:
Articles; Clean Combustion Research Center

Full metadata record

DC FieldValue Language
dc.contributor.authorAlves, Luís Lemosen
dc.contributor.authorMarques, Luís S Aen
dc.contributor.authorPintassilgo, Carlos D.en
dc.contributor.authorWattieaux, Gaëtanen
dc.contributor.authorEs-sebbar, Et-touhamien
dc.contributor.authorBerndt, Johannesen
dc.contributor.authorKovačević, Evaen
dc.contributor.authorCarrasco, Nathalieen
dc.contributor.authorBoufendi, Laïfaen
dc.contributor.authorCernogora, Guyen
dc.date.accessioned2015-08-03T09:57:41Zen
dc.date.available2015-08-03T09:57:41Zen
dc.date.issued2012-07-06en
dc.identifier.issn09630252en
dc.identifier.doi10.1088/0963-0252/21/4/045008en
dc.identifier.urihttp://hdl.handle.net/10754/562241en
dc.description.abstractThis paper uses experiments and modelling to study capacitively coupled radio-frequency (rf) discharges in pure nitrogen, at 13.56MHz frequency, 0.11 mbar pressures and 230W coupled powers. Experiments performed on two similar (not twin) setups, existing in the LATMOS and the GREMI laboratories, include electrical and optical emission spectroscopy (OES) measurements. Electrical measurements give the rf-applied and the direct-current-self-bias voltages, the effective power coupled to the plasma and the average electron density. OES diagnostics measure the intensities of radiative transitions with the nitrogen second-positive and first-negative systems, and with the 811.5 nm atomic line of argon (present as an actinometer). Simulations use a hybrid code that couples a two-dimensional time-dependent fluid module, describing the dynamics of the charged particles (electrons and positive ions N 2 + and N 4 + ), and a zero-dimensional kinetic module, describing the production and destruction of nitrogen (atomic and molecular) neutral species. The coupling between these modules adopts the local mean energy approximation to define spacetime-dependent electron parameters for the fluid module and to work out spacetime-averaged rates for the kinetic module. The model gives general good predictions for the self-bias voltage and for the intensities of radiative transitions (both average and spatially resolved), underestimating the electron density by a factor of 34. © 2012 IOP Publishing Ltd.en
dc.description.sponsorshipThis work is supported by a PICS Cooperation Program, financed by the Portuguese Foundation for Science and Technology (FCT) and by the Centre National de la Recherche Scientifique (CNRS). The calculations were performed on SeARCH (Services & Advanced Computing with HTC/HPC) funded by FEDER through the COMPETE program and by the Portuguese FCT under contract CONC-REEQ/443/EEI/2005. Et Es-sebbar thanks the ANR programme (ANR-09-JCJC-0038 contract) for his Post-Doctoral grant.en
dc.publisherIOP Publishingen
dc.titleCapacitively coupled radio-frequency discharges in nitrogen at low pressuresen
dc.typeArticleen
dc.contributor.departmentClean Combustion Research Centeren
dc.identifier.journalPlasma Sources Science and Technologyen
dc.contributor.institutionUniv Tecn Lisboa, Inst Super Tecn, Inst Plasma & Fusao Res, P-1049001 Lisbon, Portugalen
dc.contributor.institutionUniv Minho, Ctr Fis, P-4710057 Braga, Portugalen
dc.contributor.institutionUniv Porto, Fac Engn, Dept Engn Fis, P-4200465 Oporto, Portugalen
dc.contributor.institutionGREMI Univ Orleans, F-45067 Orleans, Franceen
dc.contributor.institutionLATMOS UVSQ CNRS, F-78280 Guyancourt, Franceen
kaust.authorEs-sebbar, Et-touhamien
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