Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode

Handle URI:
http://hdl.handle.net/10754/562150
Title:
Displacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrode
Authors:
Shen, Zhiyuan; Olfatnia, Mohammad; Miao, Jianmin; Wang, Zhihong
Abstract:
This paper presents the design of a lead zirconate titanate (PZT) diaphragm actuated by double-sided patterned electrodes. Au/Cr electrodes were deposited on bulk PZT wafers by sputtering while patterned by a lift-off process. SU-8 thick film was used to form the structural layer. Double-spiral electrode induced in-plane poling and piezoelectric elongation are converted to an out-of-plane displacement due to the confined boundary condition. The influence of different drive configurations and electrode parameters on deflection has been calculated by finite element methods (FEM) using a uniform field model. Impedance and quasi-static displacement spectra of the diaphragm were measured after poling. Adouble-sided patterned electrode diaphragm can be actuated by more drive configurations than a single-sided one. Compared with a single-sided electrode drive, a double-sided out-of-phase drive configuration increases the coupling coefficient of the fundamental resonance from 7.6% to 11.8%. The displacement response of the diaphragm increases from 2.6 to 8.6nmV 1. Configurations including the electric field component perpendicular to the poling direction can stimulate shear modes of the diaphragm. © 2012 IOP Publishing Ltd.
KAUST Department:
Advanced Nanofabrication, Imaging and Characterization Core Lab; Core Labs
Publisher:
IOP Publishing
Journal:
Smart Materials and Structures
Issue Date:
3-Apr-2012
DOI:
10.1088/0964-1726/21/5/055001
Type:
Article
ISSN:
09641726
Appears in Collections:
Articles; Advanced Nanofabrication, Imaging and Characterization Core Lab

Full metadata record

DC FieldValue Language
dc.contributor.authorShen, Zhiyuanen
dc.contributor.authorOlfatnia, Mohammaden
dc.contributor.authorMiao, Jianminen
dc.contributor.authorWang, Zhihongen
dc.date.accessioned2015-08-03T09:45:57Zen
dc.date.available2015-08-03T09:45:57Zen
dc.date.issued2012-04-03en
dc.identifier.issn09641726en
dc.identifier.doi10.1088/0964-1726/21/5/055001en
dc.identifier.urihttp://hdl.handle.net/10754/562150en
dc.description.abstractThis paper presents the design of a lead zirconate titanate (PZT) diaphragm actuated by double-sided patterned electrodes. Au/Cr electrodes were deposited on bulk PZT wafers by sputtering while patterned by a lift-off process. SU-8 thick film was used to form the structural layer. Double-spiral electrode induced in-plane poling and piezoelectric elongation are converted to an out-of-plane displacement due to the confined boundary condition. The influence of different drive configurations and electrode parameters on deflection has been calculated by finite element methods (FEM) using a uniform field model. Impedance and quasi-static displacement spectra of the diaphragm were measured after poling. Adouble-sided patterned electrode diaphragm can be actuated by more drive configurations than a single-sided one. Compared with a single-sided electrode drive, a double-sided out-of-phase drive configuration increases the coupling coefficient of the fundamental resonance from 7.6% to 11.8%. The displacement response of the diaphragm increases from 2.6 to 8.6nmV 1. Configurations including the electric field component perpendicular to the poling direction can stimulate shear modes of the diaphragm. © 2012 IOP Publishing Ltd.en
dc.publisherIOP Publishingen
dc.titleDisplacement and resonance behaviors of a piezoelectric diaphragm driven by a double-sided spiral electrodeen
dc.typeArticleen
dc.contributor.departmentAdvanced Nanofabrication, Imaging and Characterization Core Laben
dc.contributor.departmentCore Labsen
dc.identifier.journalSmart Materials and Structuresen
dc.contributor.institutionSchool of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singaporeen
kaust.authorWang, Zhihongen
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