Printed wax masks for 254 nm deep-UV pattering of PMMA-based microfluidics

Handle URI:
http://hdl.handle.net/10754/562058
Title:
Printed wax masks for 254 nm deep-UV pattering of PMMA-based microfluidics
Authors:
Fan, Yiqiang; Liu, Yang; Li, Huawei; Foulds, Ian G.
Abstract:
This paper reports a new technique for masking deep-UV exposure of poly(methyl methacrylate) (PMMA) using a printed wax mask. This technique provides an inexpensive and bulk fabrication method for PMMA structures. The technique involves the direct printing of the mask onto a polymer sheet using a commercial wax printer. The wax layer was then transferred to a PMMA substrate using a thermal laminator, exposed using deep-UV (with a wavelength of 254 nm), developed in an IPA:water solution, and completed by bonding on a PMMA cap layer. A sample microfluidic device fabricated with this method is also presented, with the microchannel as narrow as 50 μm. The whole process is easy to perform without the requirement for any microfabrication facilities. © 2012 IOP Publishing Ltd.
KAUST Department:
Physical Sciences and Engineering (PSE) Division; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division; Electrical Engineering Program
Publisher:
IOP Publishing
Journal:
Journal of Micromechanics and Microengineering
Issue Date:
13-Jan-2012
DOI:
10.1088/0960-1317/22/2/027001
Type:
Article
ISSN:
09601317
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division; Electrical Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorFan, Yiqiangen
dc.contributor.authorLiu, Yangen
dc.contributor.authorLi, Huaweien
dc.contributor.authorFoulds, Ian G.en
dc.date.accessioned2015-08-03T09:43:46Zen
dc.date.available2015-08-03T09:43:46Zen
dc.date.issued2012-01-13en
dc.identifier.issn09601317en
dc.identifier.doi10.1088/0960-1317/22/2/027001en
dc.identifier.urihttp://hdl.handle.net/10754/562058en
dc.description.abstractThis paper reports a new technique for masking deep-UV exposure of poly(methyl methacrylate) (PMMA) using a printed wax mask. This technique provides an inexpensive and bulk fabrication method for PMMA structures. The technique involves the direct printing of the mask onto a polymer sheet using a commercial wax printer. The wax layer was then transferred to a PMMA substrate using a thermal laminator, exposed using deep-UV (with a wavelength of 254 nm), developed in an IPA:water solution, and completed by bonding on a PMMA cap layer. A sample microfluidic device fabricated with this method is also presented, with the microchannel as narrow as 50 μm. The whole process is easy to perform without the requirement for any microfabrication facilities. © 2012 IOP Publishing Ltd.en
dc.publisherIOP Publishingen
dc.titlePrinted wax masks for 254 nm deep-UV pattering of PMMA-based microfluidicsen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.contributor.departmentElectrical Engineering Programen
dc.identifier.journalJournal of Micromechanics and Microengineeringen
kaust.authorFan, Yiqiangen
kaust.authorLi, Huaweien
kaust.authorFoulds, Ian G.en
kaust.authorLiu, Yangen
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