Fabrication of SU-8 low frequency electrostatic energy harvester

Handle URI:
http://hdl.handle.net/10754/561913
Title:
Fabrication of SU-8 low frequency electrostatic energy harvester
Authors:
Ramadan, Khaled S.; Foulds, Ian G.
Abstract:
A 1500μm × 1500μm × 150μm out-of-plane, gap closing, electrostatic energy harvester is designed and fabricated to harvest low-frequency ambient vibrations. SU-8 is used to fabricate the proof mass (1200μm × 1200μm × 150μm) and the 5 m springs. Different harvesters were designed to harvest at 50, 75 and 110 Hz. At 110 Hz, Simulations show that with an input vibration of 10 μm amplitude at the frequency of resonance of the structure, the energy harvester should generate an average output power density of 0.032μW/mm3. This is the most area-efficient low-frequency electrostatic harvester to-date. © 2011 IEEE.
KAUST Department:
Electromechanical Microsystems & Polymer Integration Research Lab (EMPIRe); Electrical Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
2011 International Conference on Energy Aware Computing
Conference/Event name:
2011 International Conference on Energy Aware Computing, ICEAC 2011
Issue Date:
Nov-2011
DOI:
10.1109/ICEAC.2011.6136689
Type:
Conference Paper
ISBN:
9781467304658
Appears in Collections:
Conference Papers; Electrical Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorRamadan, Khaled S.en
dc.contributor.authorFoulds, Ian G.en
dc.date.accessioned2015-08-03T09:33:58Zen
dc.date.available2015-08-03T09:33:58Zen
dc.date.issued2011-11en
dc.identifier.isbn9781467304658en
dc.identifier.doi10.1109/ICEAC.2011.6136689en
dc.identifier.urihttp://hdl.handle.net/10754/561913en
dc.description.abstractA 1500μm × 1500μm × 150μm out-of-plane, gap closing, electrostatic energy harvester is designed and fabricated to harvest low-frequency ambient vibrations. SU-8 is used to fabricate the proof mass (1200μm × 1200μm × 150μm) and the 5 m springs. Different harvesters were designed to harvest at 50, 75 and 110 Hz. At 110 Hz, Simulations show that with an input vibration of 10 μm amplitude at the frequency of resonance of the structure, the energy harvester should generate an average output power density of 0.032μW/mm3. This is the most area-efficient low-frequency electrostatic harvester to-date. © 2011 IEEE.en
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.subjectElectrostatic generatoren
dc.subjectEnergy Harvesteren
dc.subjectlow frequencyen
dc.subjectThick SU-8en
dc.titleFabrication of SU-8 low frequency electrostatic energy harvesteren
dc.typeConference Paperen
dc.contributor.departmentElectromechanical Microsystems & Polymer Integration Research Lab (EMPIRe)en
dc.contributor.departmentElectrical Engineering Programen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.identifier.journal2011 International Conference on Energy Aware Computingen
dc.conference.date2011-11-30 to 2011-12-02en
dc.conference.name2011 International Conference on Energy Aware Computing, ICEAC 2011en
dc.conference.locationIstanbul, TURen
kaust.authorRamadan, Khaled S.en
kaust.authorFoulds, Ian G.en
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