Optimization of Pb(Zr0.53,Ti0.47)O3 films for micropower generation using integrated cantilevers

Handle URI:
http://hdl.handle.net/10754/561855
Title:
Optimization of Pb(Zr0.53,Ti0.47)O3 films for micropower generation using integrated cantilevers
Authors:
Fuentes-Fernandez, E. M A; Baldenegro-Pérez, Leonardo Aurelio; Quevedo-López, Manuel Angel Quevedo; Gnade, Bruce E.; Hande, Abhiman; Shah, Pradeep; Alshareef, Husam N. ( 0000-0001-5029-2142 )
Abstract:
Lead zirconate titanate, Pb(Zr0.53,Ti0.47)O 3 or PZT, thin films and integrated cantilevers have been fabricated for energy harvesting applications. The PZT films were deposited on PECVD SiO2/Si substrates with a sol-gel derived ZrO2 buffer layer. It is found that lead content in the starting solution and ramp rate during film crystallization are critical to achieving large-grained films on the ZrO2 surface. The electrical properties of the PZT films were measured using metal-ferroelectric-metal and inter-digital electrode structures, and revealed substantial improvement in film properties by controlling the process conditions. Functional cantilevers are demonstrated using the optimized films with output of 1.4 V peak-to-peak at 1 kHz and 2.5 g. © 2011 Elsevier Ltd. All rights reserved.
KAUST Department:
Materials Science and Engineering Program; Physical Sciences and Engineering (PSE) Division; Functional Nanomaterials and Devices Research Group
Publisher:
Elsevier
Journal:
Solid-State Electronics
Issue Date:
Sep-2011
DOI:
10.1016/j.sse.2011.05.027
Type:
Article
ISSN:
00381101
Sponsors:
The authors would like to thank to NSF phase I SBIR and the Texas Emerging Technology Found for partial financial support and the Army Research Laboratories for their assistance in dry etch process.
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division; Materials Science and Engineering Program

Full metadata record

DC FieldValue Language
dc.contributor.authorFuentes-Fernandez, E. M Aen
dc.contributor.authorBaldenegro-Pérez, Leonardo Aurelioen
dc.contributor.authorQuevedo-López, Manuel Angel Quevedoen
dc.contributor.authorGnade, Bruce E.en
dc.contributor.authorHande, Abhimanen
dc.contributor.authorShah, Pradeepen
dc.contributor.authorAlshareef, Husam N.en
dc.date.accessioned2015-08-03T09:32:34Zen
dc.date.available2015-08-03T09:32:34Zen
dc.date.issued2011-09en
dc.identifier.issn00381101en
dc.identifier.doi10.1016/j.sse.2011.05.027en
dc.identifier.urihttp://hdl.handle.net/10754/561855en
dc.description.abstractLead zirconate titanate, Pb(Zr0.53,Ti0.47)O 3 or PZT, thin films and integrated cantilevers have been fabricated for energy harvesting applications. The PZT films were deposited on PECVD SiO2/Si substrates with a sol-gel derived ZrO2 buffer layer. It is found that lead content in the starting solution and ramp rate during film crystallization are critical to achieving large-grained films on the ZrO2 surface. The electrical properties of the PZT films were measured using metal-ferroelectric-metal and inter-digital electrode structures, and revealed substantial improvement in film properties by controlling the process conditions. Functional cantilevers are demonstrated using the optimized films with output of 1.4 V peak-to-peak at 1 kHz and 2.5 g. © 2011 Elsevier Ltd. All rights reserved.en
dc.description.sponsorshipThe authors would like to thank to NSF phase I SBIR and the Texas Emerging Technology Found for partial financial support and the Army Research Laboratories for their assistance in dry etch process.en
dc.publisherElsevieren
dc.subjectCantileveren
dc.subjectIntegrationen
dc.subjectMEMSen
dc.subjectPerovskiteen
dc.subjectPiezoelectric materialen
dc.subjectPZTen
dc.titleOptimization of Pb(Zr0.53,Ti0.47)O3 films for micropower generation using integrated cantileversen
dc.typeArticleen
dc.contributor.departmentMaterials Science and Engineering Programen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.contributor.departmentFunctional Nanomaterials and Devices Research Groupen
dc.identifier.journalSolid-State Electronicsen
dc.contributor.institutionUniversity of Texas at Dallas, 800 W. Campbell Rd., Richardson, TX 75080, United Statesen
dc.contributor.institutionTexas MicroPower Inc., 18803 Fortson Ave., Dallas TX 75252, United Statesen
kaust.authorAlshareef, Husam N.en
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