MEMS variable capacitance devices utilizing the substrate: I. Novel devices with a customizable tuning range

Handle URI:
http://hdl.handle.net/10754/561461
Title:
MEMS variable capacitance devices utilizing the substrate: I. Novel devices with a customizable tuning range
Authors:
Elshurafa, Amro M.; El-Masry, Ezz I.
Abstract:
This paper, the first in a series of two, presents a paradigm shift in the design of MEMS parallel plate PolyMUMPS variable capacitance devices by proposing two structures that utilize the substrate and are able to provide predetermined, customizable, tuning ranges and/or ratios. The proposed structures can provide theoretical tuning ranges anywhere from 4.9 to 35 and from 3.4 to 26 respectively with a simple, yet effective, layout modification as opposed to the previously reported devices where the tuning range is fixed and cannot be varied. Theoretical analysis is carried out and verified with measurements of fabricated devices. The first proposed device possessed initially a tuning range of 4.4. Two variations of the structure having tuning ranges of 3 and 3.4, all at 1 GHz, were also successfully developed and tested. The second proposed variable capacitance device behaved as a switch. © 2010 IOP Publishing Ltd.
KAUST Department:
Electrical Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Publisher:
IOP Publishing
Journal:
Journal of Micromechanics and Microengineering
Issue Date:
22-Mar-2010
DOI:
10.1088/0960-1317/20/4/045027
Type:
Article
ISSN:
09601317
Sponsors:
The authors would like to thank Dr T Hubbard for his valuable discussions and advice. This work was supported by grants from the Natural Sciences and Engineering Research Council of Canada (NSERC), by the Canadian Network of Centers of Excellence in Microelectronics (MICRONET) and by the Canadian Microelectronic Corporation (CMC Microsystems).
Appears in Collections:
Articles; Electrical Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorElshurafa, Amro M.en
dc.contributor.authorEl-Masry, Ezz I.en
dc.date.accessioned2015-08-02T09:11:57Zen
dc.date.available2015-08-02T09:11:57Zen
dc.date.issued2010-03-22en
dc.identifier.issn09601317en
dc.identifier.doi10.1088/0960-1317/20/4/045027en
dc.identifier.urihttp://hdl.handle.net/10754/561461en
dc.description.abstractThis paper, the first in a series of two, presents a paradigm shift in the design of MEMS parallel plate PolyMUMPS variable capacitance devices by proposing two structures that utilize the substrate and are able to provide predetermined, customizable, tuning ranges and/or ratios. The proposed structures can provide theoretical tuning ranges anywhere from 4.9 to 35 and from 3.4 to 26 respectively with a simple, yet effective, layout modification as opposed to the previously reported devices where the tuning range is fixed and cannot be varied. Theoretical analysis is carried out and verified with measurements of fabricated devices. The first proposed device possessed initially a tuning range of 4.4. Two variations of the structure having tuning ranges of 3 and 3.4, all at 1 GHz, were also successfully developed and tested. The second proposed variable capacitance device behaved as a switch. © 2010 IOP Publishing Ltd.en
dc.description.sponsorshipThe authors would like to thank Dr T Hubbard for his valuable discussions and advice. This work was supported by grants from the Natural Sciences and Engineering Research Council of Canada (NSERC), by the Canadian Network of Centers of Excellence in Microelectronics (MICRONET) and by the Canadian Microelectronic Corporation (CMC Microsystems).en
dc.publisherIOP Publishingen
dc.titleMEMS variable capacitance devices utilizing the substrate: I. Novel devices with a customizable tuning rangeen
dc.typeArticleen
dc.contributor.departmentElectrical Engineering Programen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.identifier.journalJournal of Micromechanics and Microengineeringen
dc.contributor.institutionElectrical and Computer Engineering, Dalhousie University, Halifax, NS, Canadaen
kaust.authorElshurafa, Amro M.en
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