MEMS variable capacitance devices utilizing the substrate: II. Zipping varactors

Handle URI:
http://hdl.handle.net/10754/561460
Title:
MEMS variable capacitance devices utilizing the substrate: II. Zipping varactors
Authors:
Elshurafa, Amro M.; El-Masry, Ezz I.
Abstract:
This paper, the second and last in this series, introduces PolyMUMPS zipping varactors that exploit the substrate and provide a high tuning range and a high quality factor. Building on the important findings of part I of this paper, the substrate was utilized effectively once again in the design and fabrication of zipping varactors to attain devices with very good performance. Two zipping varactors are proposed, analysed theoretically, simulated, fabricated and tested successfully. The tuning range, quality factor and actuation voltage of those varactors are 4.5, 16.4, 55 V and 4.2, 17, 55 V respectively. Finally, and based on one of the proposed zipping varactors, a very large capacitance value varactor array, with a tuning range of 5.3, was designed and tested. To the best of our knowledge, these zipping varactors exhibit the best reported characteristics in PolyMUMPS to date within their category in terms of tuning range, quality factor, required actuation voltage and total area consumed. © 2010 IOP Publishing Ltd.
KAUST Department:
Electrical Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Publisher:
IOP Publishing
Journal:
Journal of Micromechanics and Microengineering
Issue Date:
22-Mar-2010
DOI:
10.1088/0960-1317/20/4/045028
Type:
Article
ISSN:
09601317
Sponsors:
The authors would like to thank Dr T Hubbard for his valuable discussions and advice. This work was supported by grants from the Natural Sciences and Engineering Research Council of Canada (NSERC), by The Canadian Network of Centers of Excellence in Microelectronics (MICRONET), and by the Canadian Microelectronic Corporation (CMC Microsystems).
Appears in Collections:
Articles; Electrical Engineering Program; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorElshurafa, Amro M.en
dc.contributor.authorEl-Masry, Ezz I.en
dc.date.accessioned2015-08-02T09:11:56Zen
dc.date.available2015-08-02T09:11:56Zen
dc.date.issued2010-03-22en
dc.identifier.issn09601317en
dc.identifier.doi10.1088/0960-1317/20/4/045028en
dc.identifier.urihttp://hdl.handle.net/10754/561460en
dc.description.abstractThis paper, the second and last in this series, introduces PolyMUMPS zipping varactors that exploit the substrate and provide a high tuning range and a high quality factor. Building on the important findings of part I of this paper, the substrate was utilized effectively once again in the design and fabrication of zipping varactors to attain devices with very good performance. Two zipping varactors are proposed, analysed theoretically, simulated, fabricated and tested successfully. The tuning range, quality factor and actuation voltage of those varactors are 4.5, 16.4, 55 V and 4.2, 17, 55 V respectively. Finally, and based on one of the proposed zipping varactors, a very large capacitance value varactor array, with a tuning range of 5.3, was designed and tested. To the best of our knowledge, these zipping varactors exhibit the best reported characteristics in PolyMUMPS to date within their category in terms of tuning range, quality factor, required actuation voltage and total area consumed. © 2010 IOP Publishing Ltd.en
dc.description.sponsorshipThe authors would like to thank Dr T Hubbard for his valuable discussions and advice. This work was supported by grants from the Natural Sciences and Engineering Research Council of Canada (NSERC), by The Canadian Network of Centers of Excellence in Microelectronics (MICRONET), and by the Canadian Microelectronic Corporation (CMC Microsystems).en
dc.publisherIOP Publishingen
dc.titleMEMS variable capacitance devices utilizing the substrate: II. Zipping varactorsen
dc.typeArticleen
dc.contributor.departmentElectrical Engineering Programen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.identifier.journalJournal of Micromechanics and Microengineeringen
dc.contributor.institutionElectrical and Computer Engineering, Dalhousie University, Halifax, NS, Canadaen
kaust.authorElshurafa, Amro M.en
All Items in KAUST are protected by copyright, with all rights reserved, unless otherwise indicated.