Nonlinear Dynamics of Electrostatically Actuated MEMS Arches

Handle URI:
http://hdl.handle.net/10754/554394
Title:
Nonlinear Dynamics of Electrostatically Actuated MEMS Arches
Authors:
Al Hennawi, Qais M. ( 0000-0003-3741-842X )
Abstract:
In this thesis, we present theoretical and experimental investigation into the nonlinear statics and dynamics of clamped-clamped in-plane MEMS arches when excited by an electrostatic force. Theoretically, we first solve the equation of motion using a multi- mode Galarkin Reduced Order Model (ROM). We investigate the static response of the arch experimentally where we show several jumps due to the snap-through instability. Experimentally, a case study of in-plane silicon micromachined arch is studied and its mechanical behavior is measured using optical techniques. We develop an algorithm to extract various parameters that are needed to model the arch, such as the induced axial force, the modulus of elasticity, and the initially induced initial rise. After that, we excite the arch by a DC electrostatic force superimposed to an AC harmonic load. A softening spring behavior is observed when the excitation is close to the first resonance frequency due to the quadratic nonlinearity coming from the arch geometry and the electrostatic force. Also, a hardening spring behavior is observed when the excitation is close to the third (second symmetric) resonance frequency due to the cubic nonlinearity coming from mid-plane stretching. Then, we excite the arch by an electric load of two AC frequency components, where we report a combination resonance of the summed type. Agreement is reported among the theoretical and experimental work.
Advisors:
Younis, Mohammad I. ( 0000-0002-9491-1838 )
Committee Member:
Thoroddsen, Sigurdur T. ( 0000-0001-6997-4311 ) ; Laleg-kirati, Taous-Meriem ( 0000-0001-5944-0121 )
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Program:
Mechanical Engineering
Issue Date:
May-2015
Type:
Thesis
Appears in Collections:
Theses; Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program

Full metadata record

DC FieldValue Language
dc.contributor.advisorYounis, Mohammad I.en
dc.contributor.authorAl Hennawi, Qais M.en
dc.date.accessioned2015-05-21T07:55:01Zen
dc.date.available2015-05-21T07:55:01Zen
dc.date.issued2015-05en
dc.identifier.urihttp://hdl.handle.net/10754/554394en
dc.description.abstractIn this thesis, we present theoretical and experimental investigation into the nonlinear statics and dynamics of clamped-clamped in-plane MEMS arches when excited by an electrostatic force. Theoretically, we first solve the equation of motion using a multi- mode Galarkin Reduced Order Model (ROM). We investigate the static response of the arch experimentally where we show several jumps due to the snap-through instability. Experimentally, a case study of in-plane silicon micromachined arch is studied and its mechanical behavior is measured using optical techniques. We develop an algorithm to extract various parameters that are needed to model the arch, such as the induced axial force, the modulus of elasticity, and the initially induced initial rise. After that, we excite the arch by a DC electrostatic force superimposed to an AC harmonic load. A softening spring behavior is observed when the excitation is close to the first resonance frequency due to the quadratic nonlinearity coming from the arch geometry and the electrostatic force. Also, a hardening spring behavior is observed when the excitation is close to the third (second symmetric) resonance frequency due to the cubic nonlinearity coming from mid-plane stretching. Then, we excite the arch by an electric load of two AC frequency components, where we report a combination resonance of the summed type. Agreement is reported among the theoretical and experimental work.en
dc.language.isoenen
dc.subjectMEMSen
dc.subjectMicroarchen
dc.subjectSnap-Throughen
dc.subjectDynamicsen
dc.subjectFrequenciesen
dc.titleNonlinear Dynamics of Electrostatically Actuated MEMS Archesen
dc.typeThesisen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
thesis.degree.grantorKing Abdullah University of Science and Technologyen_GB
dc.contributor.committeememberThoroddsen, Sigurdur T.en
dc.contributor.committeememberLaleg-kirati, Taous-Meriemen
thesis.degree.disciplineMechanical Engineeringen
thesis.degree.nameMaster of Scienceen
dc.person.id129116en
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