Microfabrication of magnetostrictive beams based on NiFe film doped with B and Mo for integrated sensor systems

Handle URI:
http://hdl.handle.net/10754/552838
Title:
Microfabrication of magnetostrictive beams based on NiFe film doped with B and Mo for integrated sensor systems
Authors:
Alfadhel, Ahmed ( 0000-0003-3244-0644 ) ; Gianchandani, Y.; Kosel, Jürgen ( 0000-0002-8998-8275 )
Abstract:
This paper reports the development of integrated micro-sensors consisting of 1 -µm-thick magnetostrictive cantilevers or bridges with 500 µm in length and conducting interrogation elements. The thin films are fabricated by sputter deposition of NiFe doped with B and Mo, and the magnetic properties are enhanced by field annealing, resulting in a coercivity of 2.4 Oe. In operation, an alternating current applied to the interrogation elements magnetizes the magnetostrictive structures. The longitudinal resonant frequency is detected as an impedance change of the interrogation elements. The magnetostrictive micro-beams provide high resonant frequencies—2.95 MHz for the cantilever and 5.46 MHz for the bridge—which can be exploited to develop sensors of high sensitivity.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
Microfabrication of magnetostrictive beams based on NiFe film doped with B and Mo for integrated sensor systems 2012, 111 (7):07E515 Journal of Applied Physics
Journal:
Journal of Applied Physics
Issue Date:
9-Mar-2012
DOI:
10.1063/1.3679016
Type:
Article
ISSN:
00218979
Additional Links:
http://scitation.aip.org/content/aip/journal/jap/111/7/10.1063/1.3679016
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorAlfadhel, Ahmeden
dc.contributor.authorGianchandani, Y.en
dc.contributor.authorKosel, Jürgenen
dc.date.accessioned2015-05-14T08:49:05Zen
dc.date.available2015-05-14T08:49:05Zen
dc.date.issued2012-03-09en
dc.identifier.citationMicrofabrication of magnetostrictive beams based on NiFe film doped with B and Mo for integrated sensor systems 2012, 111 (7):07E515 Journal of Applied Physicsen
dc.identifier.issn00218979en
dc.identifier.doi10.1063/1.3679016en
dc.identifier.urihttp://hdl.handle.net/10754/552838en
dc.description.abstractThis paper reports the development of integrated micro-sensors consisting of 1 -µm-thick magnetostrictive cantilevers or bridges with 500 µm in length and conducting interrogation elements. The thin films are fabricated by sputter deposition of NiFe doped with B and Mo, and the magnetic properties are enhanced by field annealing, resulting in a coercivity of 2.4 Oe. In operation, an alternating current applied to the interrogation elements magnetizes the magnetostrictive structures. The longitudinal resonant frequency is detected as an impedance change of the interrogation elements. The magnetostrictive micro-beams provide high resonant frequencies—2.95 MHz for the cantilever and 5.46 MHz for the bridge—which can be exploited to develop sensors of high sensitivity.en
dc.relation.urlhttp://scitation.aip.org/content/aip/journal/jap/111/7/10.1063/1.3679016en
dc.rightsArchived with thanks to Journal of Applied Physicsen
dc.titleMicrofabrication of magnetostrictive beams based on NiFe film doped with B and Mo for integrated sensor systemsen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalJournal of Applied Physicsen
dc.eprint.versionPublisher's Version/PDFen
dc.contributor.institutionDepartment of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, Michigan 48109, USAen
kaust.authorAlfadhel, Ahmeden
kaust.authorKosel, Jürgenen
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