Development of FeNiMoB thin film materials for microfabricated magnetoelastic sensors

Handle URI:
http://hdl.handle.net/10754/552789
Title:
Development of FeNiMoB thin film materials for microfabricated magnetoelastic sensors
Authors:
Liang, Cai ( 0000-0002-5844-3432 ) ; Gooneratne, Chinthaka; Cha, Dong Kyu; Chen, Long; Gianchandani, Yogesh; Kosel, Jürgen ( 0000-0002-8998-8275 )
Abstract:
MetglasTM 2826MB foils of 25–30 μm thickness with the composition of Fe40Ni38Mo4B18 have been used for magnetoelastic sensors in various applications over many years. This work is directed at the investigation of ∼3 μm thick iron-nickel-molybdenum-boron (FeNiMoB) thin films that are intended for integrated microsystems. The films are deposited on Si substrate by co-sputtering of iron-nickel (FeNi), molybdenum(Mo), and boron (B) targets. The results show that dopants of Mo and B can significantly change the microstructure and magnetic properties of FeNi materials. When FeNi is doped with only Mo its crystal structure changes from polycrystalline to amorphous with the increase of dopant concentration; the transition point is found at about 10 at. % of Mo content. A significant change in anisotropic magneticproperties of FeNi is also observed as the Modopant level increases. The coercivity of FeNi filmsdoped with Mo decreases to a value less than one third of the value without dopant.Doping the FeNi with B together with Mo considerably decreases the value of coercivity and the out-of-plane magnetic anisotropyproperties, and it also greatly changes the microstructure of the material. In addition, doping B to FeNiMo remarkably reduces the remanence of the material. The filmmaterial that is fabricated using an optimized process is magnetically as soft as amorphous MetglasTM 2826MB with a coercivity of less than 40 Am−1. The findings of this study provide us a better understanding of the effects of the compositions and microstructure of FeNiMoB thin filmmaterials on their magnetic properties.
KAUST Department:
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division
Citation:
Development of FeNiMoB thin film materials for microfabricated magnetoelastic sensors 2012, 112 (11):113912 Journal of Applied Physics
Publisher:
AIP Publishing
Journal:
Journal of Applied Physics
Issue Date:
7-Dec-2012
DOI:
10.1063/1.4768458
Type:
Article
ISSN:
00218979
Additional Links:
http://scitation.aip.org/content/aip/journal/jap/112/11/10.1063/1.4768458
Appears in Collections:
Articles; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorLiang, Caien
dc.contributor.authorGooneratne, Chinthakaen
dc.contributor.authorCha, Dong Kyuen
dc.contributor.authorChen, Longen
dc.contributor.authorGianchandani, Yogeshen
dc.contributor.authorKosel, Jürgenen
dc.date.accessioned2015-05-14T07:21:15Zen
dc.date.available2015-05-14T07:21:15Zen
dc.date.issued2012-12-07en
dc.identifier.citationDevelopment of FeNiMoB thin film materials for microfabricated magnetoelastic sensors 2012, 112 (11):113912 Journal of Applied Physicsen
dc.identifier.issn00218979en
dc.identifier.doi10.1063/1.4768458en
dc.identifier.urihttp://hdl.handle.net/10754/552789en
dc.description.abstractMetglasTM 2826MB foils of 25–30 μm thickness with the composition of Fe40Ni38Mo4B18 have been used for magnetoelastic sensors in various applications over many years. This work is directed at the investigation of ∼3 μm thick iron-nickel-molybdenum-boron (FeNiMoB) thin films that are intended for integrated microsystems. The films are deposited on Si substrate by co-sputtering of iron-nickel (FeNi), molybdenum(Mo), and boron (B) targets. The results show that dopants of Mo and B can significantly change the microstructure and magnetic properties of FeNi materials. When FeNi is doped with only Mo its crystal structure changes from polycrystalline to amorphous with the increase of dopant concentration; the transition point is found at about 10 at. % of Mo content. A significant change in anisotropic magneticproperties of FeNi is also observed as the Modopant level increases. The coercivity of FeNi filmsdoped with Mo decreases to a value less than one third of the value without dopant.Doping the FeNi with B together with Mo considerably decreases the value of coercivity and the out-of-plane magnetic anisotropyproperties, and it also greatly changes the microstructure of the material. In addition, doping B to FeNiMo remarkably reduces the remanence of the material. The filmmaterial that is fabricated using an optimized process is magnetically as soft as amorphous MetglasTM 2826MB with a coercivity of less than 40 Am−1. The findings of this study provide us a better understanding of the effects of the compositions and microstructure of FeNiMoB thin filmmaterials on their magnetic properties.en
dc.publisherAIP Publishingen
dc.relation.urlhttp://scitation.aip.org/content/aip/journal/jap/112/11/10.1063/1.4768458en
dc.rightsArchived with thanks to Journal of Applied Physicsen
dc.titleDevelopment of FeNiMoB thin film materials for microfabricated magnetoelastic sensorsen
dc.typeArticleen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.identifier.journalJournal of Applied Physicsen
dc.eprint.versionPublisher's Version/PDFen
dc.contributor.institutionDepartment of Electrical Engineering and Computer Science, 1301 Beal Ave., University of Michigan, Ann Arbor, Michigan 48109, USAen
kaust.authorLiang, Caien
kaust.authorGooneratne, Chinthaka Pasanen
kaust.authorCha, Dong Kyuen
kaust.authorChen, Longen
kaust.authorKosel, Jürgenen
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