Polydimethylsiloxane-integratable micropressure sensor for microfluidic chips

Handle URI:
http://hdl.handle.net/10754/552760
Title:
Polydimethylsiloxane-integratable micropressure sensor for microfluidic chips
Authors:
Wang, Limu; Zhang, Mengying; Yang, Min; Zhu, Weiming; Wu, Jinbo; Gong, Xiuqing; Wen, Weijia
Abstract:
A novel microfluidicpressuresensor which can be fully integrated into polydimethylsiloxane(PDMS) is reported. The sensor produces electrical signals directly. We integrated PDMS-based conductive composites into a 30 μm thick membrane and bonded it to the microchannel side wall. The response time of the sensor is approximately 100 ms and can work within a pressure range as wide as 0–100 kPa. The resolution of this micropressure sensor is generally 0.1 kPa but can be increased to 0.01 kPa at high pressures as a result of the quadratic relationship between resistance and pressure. The PDMS-based nature of the sensor ensures its perfect bonding with PDMS chips, and the standard photolithographic process of the sensor allows one-time fabrication of three dimensional structures or even microsensor arrays. The theoretical calculations are in good agreement with experimental observations.
KAUST Department:
Department of Physics and KAUST-HKUST Micro/Nano-fluidics Joint Laboratory
Citation:
Polydimethylsiloxane-integratable micropressure sensor for microfluidic chips 2009, 3 (3):034105 Biomicrofluidics
Journal:
Biomicrofluidics
Issue Date:
17-Sep-2009
DOI:
10.1063/1.3230500
PubMed ID:
20216961
PubMed Central ID:
PMC2835279
Type:
Article
ISSN:
19321058
Additional Links:
http://scitation.aip.org/content/aip/journal/bmf/3/3/10.1063/1.3230500
Appears in Collections:
Articles

Full metadata record

DC FieldValue Language
dc.contributor.authorWang, Limuen
dc.contributor.authorZhang, Mengyingen
dc.contributor.authorYang, Minen
dc.contributor.authorZhu, Weimingen
dc.contributor.authorWu, Jinboen
dc.contributor.authorGong, Xiuqingen
dc.contributor.authorWen, Weijiaen
dc.date.accessioned2015-05-14T06:30:48Zen
dc.date.available2015-05-14T06:30:48Zen
dc.date.issued2009-09-17en
dc.identifier.citationPolydimethylsiloxane-integratable micropressure sensor for microfluidic chips 2009, 3 (3):034105 Biomicrofluidicsen
dc.identifier.issn19321058en
dc.identifier.pmid20216961en
dc.identifier.doi10.1063/1.3230500en
dc.identifier.urihttp://hdl.handle.net/10754/552760en
dc.description.abstractA novel microfluidicpressuresensor which can be fully integrated into polydimethylsiloxane(PDMS) is reported. The sensor produces electrical signals directly. We integrated PDMS-based conductive composites into a 30 μm thick membrane and bonded it to the microchannel side wall. The response time of the sensor is approximately 100 ms and can work within a pressure range as wide as 0–100 kPa. The resolution of this micropressure sensor is generally 0.1 kPa but can be increased to 0.01 kPa at high pressures as a result of the quadratic relationship between resistance and pressure. The PDMS-based nature of the sensor ensures its perfect bonding with PDMS chips, and the standard photolithographic process of the sensor allows one-time fabrication of three dimensional structures or even microsensor arrays. The theoretical calculations are in good agreement with experimental observations.en
dc.relation.urlhttp://scitation.aip.org/content/aip/journal/bmf/3/3/10.1063/1.3230500en
dc.rightsArchived with thanks to Biomicrofluidicsen
dc.titlePolydimethylsiloxane-integratable micropressure sensor for microfluidic chipsen
dc.typeArticleen
dc.contributor.departmentDepartment of Physics and KAUST-HKUST Micro/Nano-fluidics Joint Laboratoryen
dc.identifier.journalBiomicrofluidicsen
dc.identifier.pmcidPMC2835279en
dc.eprint.versionPublisher's Version/PDFen
dc.contributor.institutionDepartment of Physics and KAUST-HKUST Micro/Nano-fluidics Joint Laboratory, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong, People's Republic of Chinaen
kaust.authorWu, Jinboen
kaust.authorWang, Limuen
kaust.authorZhang, Mengyingen
kaust.authorYang, Minen
kaust.authorZhu, Weimingen
kaust.authorGong, Xiuqingen
kaust.authorWen, Weijiaen
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