A macromodel for squeeze-film air damping in the free-molecule regime

Handle URI:
http://hdl.handle.net/10754/552759
Title:
A macromodel for squeeze-film air damping in the free-molecule regime
Authors:
Hong, Gang; Ye, Wenjing
Abstract:
A three-dimensional Monte Carlo(MC) simulation approach is developed for the accurate prediction of the squeeze-film air damping on microresonators in the free-molecule gas regime. Based on the MC simulations and the analytical traveling-time distribution, a macromodel, which relates air damping directly with device dimensions and operation parameters, is constructed. This model provides an efficient tool for the design of high-performance microresonators. The accuracy of the macromodel is validated through the modeling of the quality factors of several microresonators. It has been found that the relative errors of the quality factors of two resonators, as compared with experimental data, are 3.9% and 5.7%, respectively. The agreements between the macromodel results and MC simulation results, on the other hand, are excellent in all cases considered.
Citation:
A macromodel for squeeze-film air damping in the free-molecule regime 2010, 22 (1):012001 Physics of Fluids
Publisher:
AIP Publishing
Journal:
Physics of Fluids
Issue Date:
7-Jan-2010
DOI:
10.1063/1.3275844
Type:
Article
ISSN:
10706631
Additional Links:
http://scitation.aip.org/content/aip/journal/pof2/22/1/10.1063/1.3275844
Appears in Collections:
Publications Acknowledging KAUST Support

Full metadata record

DC FieldValue Language
dc.contributor.authorHong, Gangen
dc.contributor.authorYe, Wenjingen
dc.date.accessioned2015-05-14T06:29:44Zen
dc.date.available2015-05-14T06:29:44Zen
dc.date.issued2010-01-07en
dc.identifier.citationA macromodel for squeeze-film air damping in the free-molecule regime 2010, 22 (1):012001 Physics of Fluidsen
dc.identifier.issn10706631en
dc.identifier.doi10.1063/1.3275844en
dc.identifier.urihttp://hdl.handle.net/10754/552759en
dc.description.abstractA three-dimensional Monte Carlo(MC) simulation approach is developed for the accurate prediction of the squeeze-film air damping on microresonators in the free-molecule gas regime. Based on the MC simulations and the analytical traveling-time distribution, a macromodel, which relates air damping directly with device dimensions and operation parameters, is constructed. This model provides an efficient tool for the design of high-performance microresonators. The accuracy of the macromodel is validated through the modeling of the quality factors of several microresonators. It has been found that the relative errors of the quality factors of two resonators, as compared with experimental data, are 3.9% and 5.7%, respectively. The agreements between the macromodel results and MC simulation results, on the other hand, are excellent in all cases considered.en
dc.publisherAIP Publishingen
dc.relation.urlhttp://scitation.aip.org/content/aip/journal/pof2/22/1/10.1063/1.3275844en
dc.rightsArchived with thanks to Physics of Fluidsen
dc.titleA macromodel for squeeze-film air damping in the free-molecule regimeen
dc.typeArticleen
dc.identifier.journalPhysics of Fluidsen
dc.eprint.versionPublisher's Version/PDFen
dc.contributor.institutionDepartment of Mechanical Engineering, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kongen
dc.contributor.institutionKAUST-HKUST Micro/Nanofluidic Joint Laboratory, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kongen
kaust.authorYe, Wenjingen
kaust.grant.fundedcenterKAUST-HKUST Micro/Nanofluidic Joint Laboratoryen
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