A Macro Model of Squeeze-Film Air Damping in the Free-Molecule Regime

Handle URI:
http://hdl.handle.net/10754/552750
Title:
A Macro Model of Squeeze-Film Air Damping in the Free-Molecule Regime
Authors:
Hong, Gang; Ye, Wenjing
Abstract:
An accurate macro model for free‐molecule squeeze‐film air damping on micro plate resonators is present. This model relates air damping directly with device dimensions and operation parameters and therefore provides an efficient tool for the design of high‐performance micro resonators. The construction of the macro model is based on Molecular Dynamics (MD) simulations and analytical traveling‐time distribution. Its accuracy is validated via the comparison between the calculated quality factors of several micro resonators and the available experimental measurements and full MD simulation results. It has been found that the relative errors of the quality factors of two resonators, as compared with experimental data, are 3.9% and 5.7% respectively. The agreements between the macro model results and MD simulation results, on the other hand, are excellent in all cases considered.
KAUST Department:
KAUST‐HKUST Micro/Nanofluidic Joint Laboratory
Citation:
A Macro Model of Squeeze‐Film Air Damping in the Free‐Molecule Regime, AIP Conference Proceedings 1233 , 219 (2010); doi: 10.1063/1.3452169
Publisher:
AIP Publishing
Conference/Event name:
2nd International Symposium on Computational Mechanics, ISCM II, and the 12th International Conference on the Enhancement and Promotion of Computational Methods in Engineering and Science, EPMESC XII
Issue Date:
30-Nov-2009
DOI:
10.1063/1.3452169
Type:
Conference Paper
Additional Links:
http://scitation.aip.org/content/aip/proceeding/aipcp/10.1063/1.3452169
Appears in Collections:
Conference Papers

Full metadata record

DC FieldValue Language
dc.contributor.authorHong, Gangen
dc.contributor.authorYe, Wenjingen
dc.date.accessioned2015-05-14T06:59:18Zen
dc.date.available2015-05-14T06:59:18Zen
dc.date.issued2009-11-30en
dc.identifier.citationA Macro Model of Squeeze‐Film Air Damping in the Free‐Molecule Regime, AIP Conference Proceedings 1233 , 219 (2010); doi: 10.1063/1.3452169en
dc.identifier.doi10.1063/1.3452169en
dc.identifier.urihttp://hdl.handle.net/10754/552750en
dc.description.abstractAn accurate macro model for free‐molecule squeeze‐film air damping on micro plate resonators is present. This model relates air damping directly with device dimensions and operation parameters and therefore provides an efficient tool for the design of high‐performance micro resonators. The construction of the macro model is based on Molecular Dynamics (MD) simulations and analytical traveling‐time distribution. Its accuracy is validated via the comparison between the calculated quality factors of several micro resonators and the available experimental measurements and full MD simulation results. It has been found that the relative errors of the quality factors of two resonators, as compared with experimental data, are 3.9% and 5.7% respectively. The agreements between the macro model results and MD simulation results, on the other hand, are excellent in all cases considered.en
dc.publisherAIP Publishingen
dc.relation.urlhttp://scitation.aip.org/content/aip/proceeding/aipcp/10.1063/1.3452169en
dc.rightsArchived with thanks to AIP Conference Proceedingsen
dc.titleA Macro Model of Squeeze-Film Air Damping in the Free-Molecule Regimeen
dc.typeConference Paperen
dc.contributor.departmentKAUST‐HKUST Micro/Nanofluidic Joint Laboratoryen
dc.conference.date2009-11-30 to 2009-12-03en
dc.conference.name2nd International Symposium on Computational Mechanics, ISCM II, and the 12th International Conference on the Enhancement and Promotion of Computational Methods in Engineering and Science, EPMESC XIIen
dc.conference.locationHong Kong, Macau, CHNen
dc.eprint.versionPublisher's Version/PDFen
dc.contributor.institutionDepartment of Mechanical Engineering, Hong Kong University of Science and Technologyen
kaust.authorYe, Wenjingen
All Items in KAUST are protected by copyright, with all rights reserved, unless otherwise indicated.