Device Fabrication and Probing of Discrete Carbon Nanostructures

Handle URI:
http://hdl.handle.net/10754/552679
Title:
Device Fabrication and Probing of Discrete Carbon Nanostructures
Authors:
Batra, Nitin M ( 0000-0002-6611-7370 )
Abstract:
Device fabrication on multi walled carbon nanotubes (MWCNTs) using electrical beam lithography (EBL), electron beam induced deposition (EBID), ion beam induced deposition (IBID) methods was carried out, followed by device electrical characterization using a conventional probe station. A four-probe configuration was utilized to measure accurately the electrical resistivity of MWCNTs with similar results obtained from devices fabricated by different methods. In order to reduce the contact resistance of the beam deposited platinum electrodes, single step vacuum thermal annealing was performed. Microscopy and spectroscopy were carried out on the beam deposited electrodes to follow the structural and chemical changes occurring during the vacuum thermal annealing. For the first time, a core-shell type structure was identified on EBID Pt and IBID Pt annealed electrodes and analogous free standing nanorods previously exposed to high temperature. We believe this observation has important implications for transport properties studies of carbon materials. Apart from that, contamination of carbon nanostructure, originating from the device fabrication methods, was also studied. Finally, based on the observations of faster processing time together with higher yield and flexibility for device preparation, we investigated EBID to fabricate devices for other discrete carbon nanostructures.
Advisors:
Da Costa, Pedro
Committee Member:
Di Fabrizio, Enzo ( 0000-0001-5886-4678 ) ; Bakr, Osman M.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Program:
Materials Science and Engineering
Issue Date:
6-May-2015
Type:
Thesis
Appears in Collections:
Theses; Physical Sciences and Engineering (PSE) Division; Materials Science and Engineering Program

Full metadata record

DC FieldValue Language
dc.contributor.advisorDa Costa, Pedroen
dc.contributor.authorBatra, Nitin Men
dc.date.accessioned2015-05-12T13:46:52Zen
dc.date.available2015-05-12T13:46:52Zen
dc.date.issued2015-05-06en
dc.identifier.urihttp://hdl.handle.net/10754/552679en
dc.description.abstractDevice fabrication on multi walled carbon nanotubes (MWCNTs) using electrical beam lithography (EBL), electron beam induced deposition (EBID), ion beam induced deposition (IBID) methods was carried out, followed by device electrical characterization using a conventional probe station. A four-probe configuration was utilized to measure accurately the electrical resistivity of MWCNTs with similar results obtained from devices fabricated by different methods. In order to reduce the contact resistance of the beam deposited platinum electrodes, single step vacuum thermal annealing was performed. Microscopy and spectroscopy were carried out on the beam deposited electrodes to follow the structural and chemical changes occurring during the vacuum thermal annealing. For the first time, a core-shell type structure was identified on EBID Pt and IBID Pt annealed electrodes and analogous free standing nanorods previously exposed to high temperature. We believe this observation has important implications for transport properties studies of carbon materials. Apart from that, contamination of carbon nanostructure, originating from the device fabrication methods, was also studied. Finally, based on the observations of faster processing time together with higher yield and flexibility for device preparation, we investigated EBID to fabricate devices for other discrete carbon nanostructures.en
dc.language.isoenen
dc.subjectCarbonen
dc.subjectCarbon Nanotubeen
dc.subjectElectronic Beam Lithographyen
dc.subjectElectronic Beam Induced Depositionen
dc.subjectIon Beam Induced Depositionen
dc.subjectGraphitizationen
dc.titleDevice Fabrication and Probing of Discrete Carbon Nanostructuresen
dc.typeThesisen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
thesis.degree.grantorKing Abdullah University of Science and Technologyen_GB
dc.contributor.committeememberDi Fabrizio, Enzoen
dc.contributor.committeememberBakr, Osman M.en
thesis.degree.disciplineMaterials Science and Engineeringen
thesis.degree.nameMaster of Scienceen
dc.person.id129081en
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