Characterization of kink actuators as compared to traditional chevron shaped Bent-Beam electrothermal actuators

Handle URI:
http://hdl.handle.net/10754/334642
Title:
Characterization of kink actuators as compared to traditional chevron shaped Bent-Beam electrothermal actuators
Authors:
Rawashdeh, E.; Karam, A.; Foulds, Ian G.
Abstract:
This paper compares the design and performance of kink actuators, a modified version of the bent-beam thermal actuator, to the standard chevron-shaped designs. A variety of kink and chevron actuator designs were fabricated from polysilicon. While the actuators were electrically probed, these designs were tested using a probe station connected to a National Instruments (NI) controller that uses LabVIEW to extract the displacement results via image processing. The displacement results were then used to validate the thermal-electric-structural simulations produced by COMSOL. These results, in turn, were used to extract the stiffness for both actuator types. The data extracted show that chevron actuators can have larger stiffness values with increasing offsets, but at the cost of lower amplification factors. In contrast, kink actuators showed a constant stiffness value equivalent to the chevron actuator with the highest amplification factor. The kink actuator also had larger amplification factors than chevrons at all designs tested. Therefore, kink actuators are capable of longer throws at lower power levels than the standard chevron designs.
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Citation:
Rawashdeh E, Karam A, Foulds IG (2012) Characterization of Kink Actuators as Compared to Traditional Chevron Shaped Bent-Beam Electrothermal Actuators. Micromachines 3: 542-549. doi:10.3390/mi3030542.
Publisher:
MDPI AG
Journal:
Micromachines
Issue Date:
6-Jul-2012
DOI:
10.3390/mi3030542
Type:
Article
ISSN:
2072666X
Appears in Collections:
Articles; Physical Sciences and Engineering (PSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorRawashdeh, E.en
dc.contributor.authorKaram, A.en
dc.contributor.authorFoulds, Ian G.en
dc.date.accessioned2014-11-11T14:33:20Z-
dc.date.available2014-11-11T14:33:20Z-
dc.date.issued2012-07-06en
dc.identifier.citationRawashdeh E, Karam A, Foulds IG (2012) Characterization of Kink Actuators as Compared to Traditional Chevron Shaped Bent-Beam Electrothermal Actuators. Micromachines 3: 542-549. doi:10.3390/mi3030542.en
dc.identifier.issn2072666Xen
dc.identifier.doi10.3390/mi3030542en
dc.identifier.urihttp://hdl.handle.net/10754/334642en
dc.description.abstractThis paper compares the design and performance of kink actuators, a modified version of the bent-beam thermal actuator, to the standard chevron-shaped designs. A variety of kink and chevron actuator designs were fabricated from polysilicon. While the actuators were electrically probed, these designs were tested using a probe station connected to a National Instruments (NI) controller that uses LabVIEW to extract the displacement results via image processing. The displacement results were then used to validate the thermal-electric-structural simulations produced by COMSOL. These results, in turn, were used to extract the stiffness for both actuator types. The data extracted show that chevron actuators can have larger stiffness values with increasing offsets, but at the cost of lower amplification factors. In contrast, kink actuators showed a constant stiffness value equivalent to the chevron actuator with the highest amplification factor. The kink actuator also had larger amplification factors than chevrons at all designs tested. Therefore, kink actuators are capable of longer throws at lower power levels than the standard chevron designs.en
dc.language.isoenen
dc.publisherMDPI AGen
dc.rightsThis is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.en
dc.rightsArchived with thanks to Micromachinesen
dc.rights.urihttp://creativecommons.org/licenses/by/3.0/en
dc.subjectBent-beamen
dc.subjectChevronen
dc.subjectKinken
dc.subjectSimulationen
dc.subjectThermal actuatorsen
dc.subjectThermal actuatoren
dc.subjectAmplificationen
dc.subjectDesignen
dc.subjectElectrostatic actuatorsen
dc.subjectImage processingen
dc.subjectPolysiliconen
dc.subjectStiffnessen
dc.subjectSurface micromachiningen
dc.subjectActuatorsen
dc.titleCharacterization of kink actuators as compared to traditional chevron shaped Bent-Beam electrothermal actuatorsen
dc.typeArticleen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
dc.identifier.journalMicromachinesen
dc.eprint.versionPublisher's Version/PDFen
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)en
kaust.authorFoulds, Ian G.en
kaust.authorAl Rawashdeh, Ehab Jamalen
kaust.authorKaram, Ayman M.en
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