Bending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragm

Handle URI:
http://hdl.handle.net/10754/325393
Title:
Bending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragm
Authors:
Wang, Zhihong; Yao, Yingbang; Wang, Xianbin; Yue, Weisheng; Chen, Longqing; Zhang, Xixiang ( 0000-0002-3478-6414 )
Abstract:
We investigated the dependence of electromechanical coupling and the piezoelectric response of a micromachined Pb(Zr 0.52 Ti 0.48)O 3 (PZT) diaphragm on its curvature by observing the impedance spectrum and central deflection responses to a small AC voltage. The curvature of the diaphragm was controlled by applying air pressure to its back. We found that a depolarized flat diaphragm does not initially exhibit electromechanical coupling or the piezoelectric response. However, upon the application of static air pressure to the diaphragm, both electromechanical coupling and the piezoelectric response can be induced in the originally depolarized diaphragm. The piezoelectric response increases as the curvature increases and a giant piezoelectric response can be obtained from a bent diaphragm. The obtained results clearly demonstrate that a high strain gradient in a diaphragm can polarize a PZT film through a flexoelectric effect, and that the induced piezoelectric response of the diaphragm can be controlled by adjusting its curvature.
KAUST Department:
Advanced Nanofabrication, Imaging and Characterization Core Lab
Citation:
Wang Z, Yao Y, Wang X, Yue W, Chen L, et al. (2013) Bending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragm. Sci Rep 3. doi:10.1038/srep03127.
Publisher:
Nature Publishing Group
Journal:
Scientific Reports
Issue Date:
4-Nov-2013
DOI:
10.1038/srep03127
PubMed ID:
24185198
PubMed Central ID:
PMC3816290
Type:
Article
ISSN:
20452322
Appears in Collections:
Articles; Advanced Nanofabrication, Imaging and Characterization Core Lab

Full metadata record

DC FieldValue Language
dc.contributor.authorWang, Zhihongen
dc.contributor.authorYao, Yingbangen
dc.contributor.authorWang, Xianbinen
dc.contributor.authorYue, Weishengen
dc.contributor.authorChen, Longqingen
dc.contributor.authorZhang, Xixiangen
dc.date.accessioned2014-08-27T09:50:31Z-
dc.date.available2014-08-27T09:50:31Z-
dc.date.issued2013-11-04en
dc.identifier.citationWang Z, Yao Y, Wang X, Yue W, Chen L, et al. (2013) Bending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragm. Sci Rep 3. doi:10.1038/srep03127.en
dc.identifier.issn20452322en
dc.identifier.pmid24185198en
dc.identifier.doi10.1038/srep03127en
dc.identifier.urihttp://hdl.handle.net/10754/325393en
dc.description.abstractWe investigated the dependence of electromechanical coupling and the piezoelectric response of a micromachined Pb(Zr 0.52 Ti 0.48)O 3 (PZT) diaphragm on its curvature by observing the impedance spectrum and central deflection responses to a small AC voltage. The curvature of the diaphragm was controlled by applying air pressure to its back. We found that a depolarized flat diaphragm does not initially exhibit electromechanical coupling or the piezoelectric response. However, upon the application of static air pressure to the diaphragm, both electromechanical coupling and the piezoelectric response can be induced in the originally depolarized diaphragm. The piezoelectric response increases as the curvature increases and a giant piezoelectric response can be obtained from a bent diaphragm. The obtained results clearly demonstrate that a high strain gradient in a diaphragm can polarize a PZT film through a flexoelectric effect, and that the induced piezoelectric response of the diaphragm can be controlled by adjusting its curvature.en
dc.language.isoenen
dc.publisherNature Publishing Groupen
dc.rightsThis work is licensed under a Creative Commons Attribution-NonCommercial-ShareALike 3.0 Unported License. To view a copy of this license, visit http://creativecommons.org/licenses/by-nc-sa/3.0/en
dc.rights.urihttp://creativecommons.org/licenses/by-nc-sa/3.0/en
dc.titleBending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragmen
dc.typeArticleen
dc.contributor.departmentAdvanced Nanofabrication, Imaging and Characterization Core Laben
dc.identifier.journalScientific Reportsen
dc.identifier.pmcidPMC3816290en
dc.eprint.versionPublisher's Version/PDFen
dc.contributor.institutionUnidad Académica de Sistemas Arrecifales (Puerto Morelos), Instituto de Ciencias Del Mar y Limnología, Universidad Nacional Autõnoma de México, Puerto Morelos, QR 77580, Mexicoen
dc.contributor.institutionSchool of Natural Sciences, University of California Merced, 5200 North Lake Road, Merced, CA 95343, United Statesen
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)en
kaust.authorWang, Zhihongen
kaust.authorYao, Yingbangen
kaust.authorWang, Xianbinen
kaust.authorYue, Weishengen
kaust.authorChen, Longqingen
kaust.authorZhang, Xixiangen

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