Higher Order Modes Excitation of Micro Cantilever Beams

Handle URI:
http://hdl.handle.net/10754/317259
Title:
Higher Order Modes Excitation of Micro Cantilever Beams
Authors:
Jaber, Nizar
Abstract:
In this study, we present analytical and experimental investigation of electrically actuated micro cantilever based resonators. These devices are fabricated using polyimide and coated with chrome and gold layers from both sides. The cantilevers are highly curled up due to stress gradient, which is a common imperfection in surface micro machining. Using a laser Doppler vibrometer, we applied a noise signal to experimentally find the first four resonance frequencies. Then, using a data acquisition card, we swept the excitation frequency around the first four natural modes of vibrations. Theoretically, we derived a reduced order model using the Galerkin method to simulate the dynamics of the system. Extensive numerical analysis and computations were performed. The numerical analysis was able to provide good matching with experimental values of the resonance frequencies. Also, we proved the ability to excite higher order modes using partial electrodes with shapes that resemble the shape of the mode of interest. Such micro-resonators are shown to be promising for applications in mass and gas sensing.
Advisors:
Younis, Mohammad I. ( 0000-0002-9491-1838 )
Committee Member:
Claudel, Christian G. ( 0000-0003-0702-6548 ) ; Thoroddsen, Sigurdur T ( 0000-0001-6997-4311 )
KAUST Department:
Physical Sciences and Engineering (PSE) Division
Program:
Mechanical Engineering
Issue Date:
May-2014
Type:
Thesis
Appears in Collections:
Theses; Physical Sciences and Engineering (PSE) Division; Mechanical Engineering Program

Full metadata record

DC FieldValue Language
dc.contributor.advisorYounis, Mohammad I.en
dc.contributor.authorJaber, Nizaren
dc.date.accessioned2014-05-21T09:35:16Z-
dc.date.available2014-05-21T09:35:16Z-
dc.date.issued2014-05en
dc.identifier.urihttp://hdl.handle.net/10754/317259en
dc.description.abstractIn this study, we present analytical and experimental investigation of electrically actuated micro cantilever based resonators. These devices are fabricated using polyimide and coated with chrome and gold layers from both sides. The cantilevers are highly curled up due to stress gradient, which is a common imperfection in surface micro machining. Using a laser Doppler vibrometer, we applied a noise signal to experimentally find the first four resonance frequencies. Then, using a data acquisition card, we swept the excitation frequency around the first four natural modes of vibrations. Theoretically, we derived a reduced order model using the Galerkin method to simulate the dynamics of the system. Extensive numerical analysis and computations were performed. The numerical analysis was able to provide good matching with experimental values of the resonance frequencies. Also, we proved the ability to excite higher order modes using partial electrodes with shapes that resemble the shape of the mode of interest. Such micro-resonators are shown to be promising for applications in mass and gas sensing.en
dc.language.isoenen
dc.subjectMEMSen
dc.subjectMicroContileveren
dc.subjectElectrostaticen
dc.subjectResonatorsen
dc.subjectModesen
dc.titleHigher Order Modes Excitation of Micro Cantilever Beamsen
dc.typeThesisen
dc.contributor.departmentPhysical Sciences and Engineering (PSE) Divisionen
thesis.degree.grantorKing Abdullah University of Science and Technologyen_GB
dc.contributor.committeememberClaudel, Christian G.en
dc.contributor.committeememberThoroddsen, Sigurdur Ten
thesis.degree.disciplineMechanical Engineeringen
thesis.degree.nameMaster of Scienceen
dc.person.id124268en
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