Modeling and fabrication of an RF MEMS variable capacitor with a fractal geometry

Handle URI:
http://hdl.handle.net/10754/298986
Title:
Modeling and fabrication of an RF MEMS variable capacitor with a fractal geometry
Authors:
Elshurafa, Amro M.; Ho, P.H.; Salama, Khaled N. ( 0000-0001-7742-1282 )
Abstract:
In this paper, we model, fabricate, and measure an electrostatically actuated MEMS variable capacitor that utilizes a fractal geometry and serpentine-like suspension arms. Explicitly, a variable capacitor that possesses a top suspended plate with a specific fractal geometry and also possesses a bottom fixed plate complementary in shape to the top plate has been fabricated in the PolyMUMPS process. An important benefit that was achieved from using the fractal geometry in designing the MEMS variable capacitor is increasing the tuning range of the variable capacitor beyond the typical ratio of 1.5. The modeling was carried out using the commercially available finite element software COMSOL to predict both the tuning range and pull-in voltage. Measurement results show that the tuning range is 2.5 at a maximum actuation voltage of 10V.
KAUST Department:
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division; Sensors Lab
Citation:
Elshurafa AM, Salama KN, Ho PH (2013) Modeling and fabrication of an RF MEMS variable capacitor with a fractal geometry. 2013 IEEE International Symposium on Circuits and Systems (ISCAS2013). doi:10.1109/ISCAS.2013.6572438.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Journal:
2013 IEEE International Symposium on Circuits and Systems (ISCAS2013)
Conference/Event name:
2013 IEEE International Symposium on Circuits and Systems, ISCAS 2013
Issue Date:
16-Aug-2013
DOI:
10.1109/ISCAS.2013.6572438
Type:
Conference Paper
Additional Links:
http://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=6572438
Appears in Collections:
Conference Papers; Sensors Lab; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorElshurafa, Amro M.en
dc.contributor.authorHo, P.H.en
dc.contributor.authorSalama, Khaled N.en
dc.date.accessioned2013-08-16T05:43:56Z-
dc.date.available2013-08-16T05:43:56Z-
dc.date.issued2013-08-16en
dc.identifier.citationElshurafa AM, Salama KN, Ho PH (2013) Modeling and fabrication of an RF MEMS variable capacitor with a fractal geometry. 2013 IEEE International Symposium on Circuits and Systems (ISCAS2013). doi:10.1109/ISCAS.2013.6572438.en
dc.identifier.doi10.1109/ISCAS.2013.6572438en
dc.identifier.urihttp://hdl.handle.net/10754/298986en
dc.description.abstractIn this paper, we model, fabricate, and measure an electrostatically actuated MEMS variable capacitor that utilizes a fractal geometry and serpentine-like suspension arms. Explicitly, a variable capacitor that possesses a top suspended plate with a specific fractal geometry and also possesses a bottom fixed plate complementary in shape to the top plate has been fabricated in the PolyMUMPS process. An important benefit that was achieved from using the fractal geometry in designing the MEMS variable capacitor is increasing the tuning range of the variable capacitor beyond the typical ratio of 1.5. The modeling was carried out using the commercially available finite element software COMSOL to predict both the tuning range and pull-in voltage. Measurement results show that the tuning range is 2.5 at a maximum actuation voltage of 10V.en
dc.language.isoenen
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.relation.urlhttp://ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=6572438en
dc.subjectfractalen
dc.subjectvariable capacitoren
dc.subjectRF MEMSen
dc.titleModeling and fabrication of an RF MEMS variable capacitor with a fractal geometryen
dc.typeConference Paperen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.contributor.departmentSensors Laben
dc.identifier.journal2013 IEEE International Symposium on Circuits and Systems (ISCAS2013)en
dc.conference.date19 May 2013 through 23 May 2013en
dc.conference.name2013 IEEE International Symposium on Circuits and Systems, ISCAS 2013en
dc.conference.locationBeijingen
dc.eprint.versionPre-printen
kaust.authorElshurafa, Amro M.en
kaust.authorSalama, Khaled N.en
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