Low-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in

Handle URI:
http://hdl.handle.net/10754/246444
Title:
Low-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in
Authors:
Elshurafa, Amro M.; Ho, P.H.; Ouda, Mahmoud H.; Radwan, Ahmed Gomaa; Salama, Khaled N. ( 0000-0001-7742-1282 )
Abstract:
This Letter introduces an electrostatically actuated fractal MEMS variable capacitor that, by utilising the substrate, extends the tuning range (TR) beyond the theoretical limit of 1.5 as dictated by the pull-in phenomenon. The backbone concept behind the fractal varactor is to create a suspended movable plate possessing a specific fractal geometry, and to simultaneously create a bottom fixed plate complementary in shape to the top plate. Thus, when the top plate is actuated, it moves towards the bottom plate and fills the void present within the bottom plate without touching it akin to how puzzle pieces are assembled. Further, a reasonable horizontal separation is maintained between both the plates to avoid shorting. The electrostatic forces come from the capacitance formed between the top plate and bottom plate, and from the capacitance formed between the top plate and the doped substrate. The variable capacitor was fabricated in the PolyMUMPS process and provided a TR of 4.1 at 6 V, and its resonant frequency was in excess of 40 GHz.
KAUST Department:
Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division; Sensors Lab
Citation:
Ho PH, Elshurafa AM, Ouda MH, Radwan AG, Salama KN (2012) Low-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in. Micro & Nano Letters 7: 965-969. doi:10.1049/mnl.2012.0642.
Publisher:
Institution of Engineering and Technology
Journal:
Micro & Nano Letters
Issue Date:
1-Oct-2012
DOI:
10.1049/mnl.2012.0642
Type:
Article
ISSN:
17500443
Additional Links:
http://link.aip.org/link/MNLIBX/v7/i9/p965/s1&Agg=doi
Appears in Collections:
Articles; Sensors Lab; Computer, Electrical and Mathematical Sciences and Engineering (CEMSE) Division

Full metadata record

DC FieldValue Language
dc.contributor.authorElshurafa, Amro M.en
dc.contributor.authorHo, P.H.en
dc.contributor.authorOuda, Mahmoud H.en
dc.contributor.authorRadwan, Ahmed Gomaaen
dc.contributor.authorSalama, Khaled N.en
dc.date.accessioned2012-10-01T14:21:34Z-
dc.date.available2012-10-01T14:21:34Z-
dc.date.issued2012-10-01en
dc.identifier.citationHo PH, Elshurafa AM, Ouda MH, Radwan AG, Salama KN (2012) Low-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in. Micro & Nano Letters 7: 965-969. doi:10.1049/mnl.2012.0642.en
dc.identifier.issn17500443en
dc.identifier.doi10.1049/mnl.2012.0642en
dc.identifier.urihttp://hdl.handle.net/10754/246444en
dc.description.abstractThis Letter introduces an electrostatically actuated fractal MEMS variable capacitor that, by utilising the substrate, extends the tuning range (TR) beyond the theoretical limit of 1.5 as dictated by the pull-in phenomenon. The backbone concept behind the fractal varactor is to create a suspended movable plate possessing a specific fractal geometry, and to simultaneously create a bottom fixed plate complementary in shape to the top plate. Thus, when the top plate is actuated, it moves towards the bottom plate and fills the void present within the bottom plate without touching it akin to how puzzle pieces are assembled. Further, a reasonable horizontal separation is maintained between both the plates to avoid shorting. The electrostatic forces come from the capacitance formed between the top plate and bottom plate, and from the capacitance formed between the top plate and the doped substrate. The variable capacitor was fabricated in the PolyMUMPS process and provided a TR of 4.1 at 6 V, and its resonant frequency was in excess of 40 GHz.en
dc.language.isoenen
dc.publisherInstitution of Engineering and Technologyen
dc.relation.urlhttp://link.aip.org/link/MNLIBX/v7/i9/p965/s1&Agg=doien
dc.rightsArchived with thanks to Micro & Nano Lettersen
dc.subjectRF memsen
dc.subjectvariable capacitoren
dc.subjectSelf Resonanance Frequency (SRF)en
dc.titleLow-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-inen
dc.typeArticleen
dc.contributor.departmentComputer, Electrical and Mathematical Sciences and Engineering (CEMSE) Divisionen
dc.contributor.departmentSensors Laben
dc.identifier.journalMicro & Nano Lettersen
dc.eprint.versionPost-printen
dc.contributor.institutionASM Pacific Technology Hong Kong Limited, Kwai Chung, Hong Kongen
dc.contributor.institutionCairo University, Engineering Mathematics, Giza 12613, Egypten
dc.contributor.affiliationKing Abdullah University of Science and Technology (KAUST)en
kaust.authorElshurafa, Amro M.en
kaust.authorSalama, Khaled N.en
kaust.authorOuda, Mahmoud H.en
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